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Patents Grantslast 30 patents

Information Patent Grant
Spin chuck with rotating gas showerhead
- Patent number 10,167,552
- Issue date Jan 1, 2019
- LAM RESEARCH AG
- Andreas Gleissner
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SPIN CHUCK WITH GAS LEAKAGE PREVENTION
- Publication number 20170162426
- Publication date Jun 8, 2017
- LAM RESEARCH AG
- Andreas GLEISSNER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPIN CHUCK WITH ROTATING GAS SHOWERHEAD
- Publication number 20160230278
- Publication date Aug 11, 2016
- LAM RESEARCH AG
- Andreas GLEISSNER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEVICE FOR TREATING SURFACES OF WAFER-SHAPED ARTICLES
- Publication number 20120305036
- Publication date Dec 6, 2012
- LAM RESEARCH AG
- Otto LACH
- H01 - BASIC ELECTRIC ELEMENTS