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Elchingen, DE
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Patents Grants
last 30 patents
Information
Patent Grant
Imaging device in a projection exposure facility
Patent number
8,514,371
Issue date
Aug 20, 2013
Carl Zeiss SMT GmbH
Wolfgang Hummel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Imaging device in a projection exposure facility
Patent number
7,961,294
Issue date
Jun 14, 2011
Carl Zeiss SMT GmbH
Wolfgang Hummel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Imaging device in a projection exposure machine
Patent number
7,710,542
Issue date
May 4, 2010
Carl Zeiss SMT AG
Wolfgang Hummel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Imaging device in a projection exposure machine
Patent number
7,486,382
Issue date
Feb 3, 2009
Carl Zeiss SMT AG
Stephan Back
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Imaging device in a projection exposure facility
Patent number
7,304,717
Issue date
Dec 4, 2007
Carl Zelss SMT AG
Wolfgang Hummel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
IMAGING DEVICE IN A PROJECTION EXPOSURE FACILITY
Publication number
20110199597
Publication date
Aug 18, 2011
Carl Zeiss SMT GMBH
Wolfgang Hummel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Imaging Device in a Projection Exposure Machine
Publication number
20090141258
Publication date
Jun 4, 2009
Carl Zeiss SMT AG
Stephan Back
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
IMAGING DEVICE IN A PROJECTION EXPOSURE FACILITY
Publication number
20090040487
Publication date
Feb 12, 2009
Carl Zeiss SMT AG
Wolfgang Hummel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
IMAGING DEVICE IN A PROJECTION EXPOSURE MACHINE
Publication number
20080174757
Publication date
Jul 24, 2008
Carl Zeiss SMT AG
Wolfgang Hummel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Imaging device in a projection exposure machine
Publication number
20060164619
Publication date
Jul 27, 2006
Carl Zeiss SMT AG
Stephan Back
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Imaging device in a projection exposure facility
Publication number
20040263812
Publication date
Dec 30, 2004
Wolfgang Hummel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY