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Markus Rochel
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Radebeul, DE
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last 30 patents
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Patent Grant
Semiconductor device including a cavity
Patent number
8,471,346
Issue date
Jun 25, 2013
Infineon Technologies AG
Thoralf Kautzsch
G01 - MEASURING TESTING
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last 30 patents
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Patent Application
SEMICONDUCTOR DEVICE INCLUDING A CAVITY
Publication number
20100218613
Publication date
Sep 2, 2010
INFINEON TECHNOLOGIES AG
Thoralf Kautzsch
G01 - MEASURING TESTING