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Markus Wagner
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Wien, AT
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Patents Grants
last 30 patents
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Patent Grant
Correction of short-range dislocations in a multi-beam writer
Patent number
9,568,907
Issue date
Feb 14, 2017
IMS Nanofabrication AG
Elmar Platzgummer
G05 - CONTROLLING REGULATING
Patents Applications
last 30 patents
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Patent Application
Correction of Short-Range Dislocations in a Multi-Beam Writer
Publication number
20160071684
Publication date
Mar 10, 2016
IMS Nanofabrication AG
Elmar Platzgummer
H01 - BASIC ELECTRIC ELEMENTS