Markus Waiblinger

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Dresden, DE

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus and method for correlating images of a photolithographic...
- Patent number 9,990,737
- Issue date Jun 5, 2018
- Carl Zeiss SMT GmbH
- Dieter Weber
- G02 - OPTICS
Information Patent Grant
Method for determining the performance of a photolithographic mask
- Patent number 9,431,212
- Issue date Aug 30, 2016
- Carl Zeiss SMS GmbH
- Markus Waiblinger
- G01 - MEASURING TESTING
Information Patent Grant
Method for producing a photomask, method for patterning a layer or...
- Patent number 7,820,343
- Issue date Oct 26, 2010
- Advanced Mask Technology Center GmbH & Co. KG
- Markus Waiblinger
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for determining an exposure dose and exposure apparatus
- Patent number 7,811,727
- Issue date Oct 12, 2010
- Advanced Mask Technology Center GmbH & Co. KG
- Martin Sczyrba
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS AND METHOD FOR CORRELATING IMAGES OF A PHOTOLITHOGRAPHIC...
- Publication number 20150169997
- Publication date Jun 18, 2015
- CARL ZEISS SMS GMBH
- Dieter Weber
- G02 - OPTICS
Information Patent Application
METHOD FOR DETERMINING THE PERFORMANCE OF A PHOTOLITHOGRAPHIC MASK
- Publication number 20130126728
- Publication date May 23, 2013
- CARL ZEISS SMS GMBH
- Markus Waiblinger
- G01 - MEASURING TESTING
Information Patent Application
Method for Producing a Photomask, Method for Patterning a Layer or...
- Publication number 20080102382
- Publication date May 1, 2008
- Advanced Mask Technology Center GmbH & Co. KG
- Markus Waiblinger
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for determining an exposure dose and exposure apparatus
- Publication number 20070117032
- Publication date May 24, 2007
- Advantage Mask Technology Center GmbH & Co. KG
- Martin Sczyrba
- B82 - NANO-TECHNOLOGY