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Markus Zenzinger
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Ulm, DE
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Patents Grants
last 30 patents
Information
Patent Grant
Microlithographic exposure method as well as a projection exposure...
Patent number
8,767,181
Issue date
Jul 1, 2014
Carl Zeiss SMT GmbH
Toralf Gruner
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Microlithographic exposure method as well as a projection exposure...
Patent number
7,847,921
Issue date
Dec 7, 2010
Carl Zeiss SMT AG
Toralf Gruner
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Microlithographic exposure method as well as a projection exposure...
Patent number
7,408,616
Issue date
Aug 5, 2008
Carl Zeiss SMT AG
Toralf Gruner
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
OPTICAL SYSTEM FOR GENERATING A LIGHT BEAM FOR TREATING A SUBSTRATE
Publication number
20120153189
Publication date
Jun 21, 2012
CARL ZEISS LASER OPTICS GmbH
Johannes Wangler
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
MICROLITHOGRAPHIC EXPOSURE METHOD AS WELL AS A PROJECTION EXPOSURE...
Publication number
20110069296
Publication date
Mar 24, 2011
Carl Zeiss SMT AG
Toralf Gruner
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MICROLITHOGRAPHIC EXPOSURE METHOD AS WELL AS A PROJECTION EXPOSURE...
Publication number
20090040496
Publication date
Feb 12, 2009
Carl Zeiss
Toralf GRUNER
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Illumination System for a Microlithography Projection Exposure Inst...
Publication number
20070263199
Publication date
Nov 15, 2007
Carl Zeiss SMT AG
Damian Fiolka
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method for improving the optical polarization properties of a micro...
Publication number
20060204204
Publication date
Sep 14, 2006
Markus Zenzinger
G02 - OPTICS
Information
Patent Application
Microlithographic exposure method as well as a projection exposure...
Publication number
20050146704
Publication date
Jul 7, 2005
Carl Zeiss SMT AG
Toralf Gruner
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Retardation element made from cubic crystal and an optical system t...
Publication number
20040218271
Publication date
Nov 4, 2004
Carl Zeiss SMT AG
Juergen Hartmaier
G02 - OPTICS