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Marleen KOOIMAN
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Eindhoven, NL
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Patents Grants
last 30 patents
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Patent Grant
Systems and methods for reducing resist model prediction errors
Patent number
11,966,167
Issue date
Apr 23, 2024
ASML Netherlands B.V.
Marleen Kooiman
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
SEM FOV fingerprint in stochastic EPE and placement measurements in...
Patent number
11,435,671
Issue date
Sep 6, 2022
ASML Netherlands B.V.
Marleen Kooiman
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method for controlling a manufacturing apparatus and associated app...
Patent number
11,016,399
Issue date
May 25, 2021
ASML Netherlands B.V.
Marleen Kooiman
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
SEM IMAGE ALIGNMENT
Publication number
20240257367
Publication date
Aug 1, 2024
ASML NETHERLANDS B.V.
Marleen KOOIMAN
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
DATA-DRIVEN PREDICTION AND IDENTIFICATION OF FAILURE MODES BASED ON...
Publication number
20240062356
Publication date
Feb 22, 2024
ASML NETHERLANDS B.V.
Huina XU
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD FOR CALIBRATING SIMULATION PROCESS BASED ON DEFECT-BASED PRO...
Publication number
20230076218
Publication date
Mar 9, 2023
ASML NETHERLANDS B.V.
Koenraad VAN INGEN SCHENAU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MULTI-STEP PROCESS INSPECTION METHOD
Publication number
20220382163
Publication date
Dec 1, 2022
ASML NETHERLANDS B.V.
Marleen KOOIMAN
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD FOR DETERMINING DEFECTIVENESS OF PATTERN BASED ON AFTER DEVE...
Publication number
20220342316
Publication date
Oct 27, 2022
ASML NETHERLANDS B.V.
Marleen KOOIMAN
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SYSTEMS AND METHODS FOR IMPROVING RESIST MODEL PREDICTIONS
Publication number
20210033978
Publication date
Feb 4, 2021
ASML NETHERLANDS B.V.
Marleen KOOIMAN
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SYSTEMS AND METHODS FOR REDUCING RESIST MODEL PREDICTION ERRORS
Publication number
20200348598
Publication date
Nov 5, 2020
ASML NETHERLANDS B.V.
Marleen KOOIMAN
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD FOR CONTROLLING A MANUFACTURING APPARATUS AND ASSOCIATED APP...
Publication number
20200310254
Publication date
Oct 1, 2020
ASML NETHERLANDS B.V.
Marleen KOOIMAN
G01 - MEASURING TESTING
Information
Patent Application
SEM FOV FINGERPRINT IN STOCHASTIC EPE AND PLACEMENT MEASUREMENTS IN...
Publication number
20200173940
Publication date
Jun 4, 2020
Marleen KOOIMAN
H01 - BASIC ELECTRIC ELEMENTS