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Martijn Gerard Dominique Wehrens
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Waalre, NL
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Patents Grants
last 30 patents
Information
Patent Grant
System and method for creating and utilizing dual laser curtains fr...
Patent number
9,497,840
Issue date
Nov 15, 2016
ASML Netherlands B.V.
Martijn Wehrens
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Sensor and lithographic apparatus
Patent number
9,331,117
Issue date
May 3, 2016
ASML Netherlands B.V.
Stoyan Nihtianov
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
System and method for controlling droplet timing in an LPP EUV ligh...
Patent number
9,241,395
Issue date
Jan 19, 2016
ASML Netherlands B.V.
Vahan Senekerimyan
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Lithographic apparatus and a method for determining a polarization...
Patent number
9,170,498
Issue date
Oct 27, 2015
ASML Netherlands B.V.
Marcus Adrianus Van De Kerkhof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and detector apparatus
Patent number
8,934,083
Issue date
Jan 13, 2015
ASML Netherlands B.V.
Ivan Sergejevitsj Nikolaev
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
System and method for controlling droplet timing and steering in an...
Patent number
8,809,823
Issue date
Aug 19, 2014
ASML Netherlands B.V.
Vahan Senekerimyan
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Grating for EUV-radiation, method for manufacturing the grating and...
Patent number
8,559,108
Issue date
Oct 15, 2013
ASML Netherlands B.V.
Borgert Kruizinga
G02 - OPTICS
Patents Applications
last 30 patents
Information
Patent Application
Sensor and Lithographic Apparatus
Publication number
20150294998
Publication date
Oct 15, 2015
ASML NETHERLANDS B.V.
Stoyan Nihtianov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
System and Method for Controlling Droplet Timing in an LPP EUV Ligh...
Publication number
20150083898
Publication date
Mar 26, 2015
Cymer, Inc.
Vahan Senekerimyan
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
System and Method for Creating and Utilizing Dual Laser Curtains Fr...
Publication number
20150083936
Publication date
Mar 26, 2015
CYMER, LLC
Martijn Wehrens
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Lithographic Apparatus and a Method for Determining a Polarization...
Publication number
20130176547
Publication date
Jul 11, 2013
ASML NETHERLANDS B.V.
Marcus Adrianus VAN DE KERKHOF
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic Apparatus And Detector Apparatus
Publication number
20120081683
Publication date
Apr 5, 2012
ASML NETHERLANDS B.V.
Ivan Sergejevitsj Nikolaev
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and a method for determining a polarization...
Publication number
20060203221
Publication date
Sep 14, 2006
ASML NETHERLANDS B.V.
Marcus Adrianus Van De Kerkhof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY