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Martijn Hendrik Kamphuis
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Veldhoven, NL
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last 30 patents
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Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,780,321
Issue date
Jul 15, 2014
ASML Netherlands B.V.
Thijs Egidius Johannes Knaapen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20110273679
Publication date
Nov 10, 2011
ASML NETHERLANDS B.V.
Thijs Egidius Johannes KNAAPEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20100157260
Publication date
Jun 24, 2010
ASML NETHERLANDS B.V.
Thijs Egidius Johannes KNAAPEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY