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Martijn Hendrikus Wilhelmus STOPEL
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Enschede, NL
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Patents Grants
last 30 patents
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Patent Grant
Sensor system, substrate handling system and lithographic apparatus
Patent number
10,007,197
Issue date
Jun 26, 2018
ASML Netherlands B.V.
Joeri Lof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
SENSOR SYSTEM, SUBSTRATE HANDLING SYSTEM AND LITHOGRAPHIC APPARATUS
Publication number
20160370716
Publication date
Dec 22, 2016
ASML NETHERLANDS B.V.
Joeri LOF
G01 - MEASURING TESTING