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Martijn Maria ZAAL
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Veldhoven, NL
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Patents Grants
last 30 patents
Information
Patent Grant
Method and apparatus to determine a patterning process parameter
Patent number
11,710,668
Issue date
Jul 25, 2023
ASML Netherlands B.V.
Adriaan Johan Van Leest
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of determining information about a patterning process, metho...
Patent number
11,604,419
Issue date
Mar 14, 2023
ASML Netherlands B.V.
Joannes Jitse Venselaar
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method of determining information about a patterning process, metho...
Patent number
11,022,897
Issue date
Jun 1, 2021
ASML Netherlands B.V.
Joannes Jitse Venselaar
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method and apparatus to determine a patterning process parameter
Patent number
10,811,323
Issue date
Oct 20, 2020
ASML Netherlands B.V.
Adriaan Johan Van Leest
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of optimizing a metrology process
Patent number
10,585,354
Issue date
Mar 10, 2020
ASML Netherlands B.V.
Anagnostis Tsiatmas
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and device for determining adjustments to sensitivity parame...
Patent number
10,520,830
Issue date
Dec 31, 2019
ASML Netherlands B.V.
Harm Hubertus Joseph Elizabeth Kicken
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
METHOD AND APPARATUS TO DETERMINE A PATTERNING PROCESS PARAMETER
Publication number
20210035871
Publication date
Feb 4, 2021
ASML NETHERLANDS B.V.
Adriaan Johan VAN LEEST
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD OF OPTIMIZING A METROLOGY PROCESS
Publication number
20190243253
Publication date
Aug 8, 2019
ASML NETHERLANDS B.V.
Anagnostis TSIATMAS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD AND DEVICE FOR DETERMINING ADJUSTMENTS TO SENSITIVITY PARAME...
Publication number
20190204755
Publication date
Jul 4, 2019
ASML NETHERLANDS B.V.
Harm Hubertus Joseph Elizabeth KICKEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD OF DETERMINING INFORMATION ABOUT A PATTERNING PROCESS, METHO...
Publication number
20190171115
Publication date
Jun 6, 2019
ASML NETHERLANDS B.V.
Joannes Jitse VENSELAAR
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD AND APPARATUS TO DETERMINE A PATTERNING PROCESS PARAMETER
Publication number
20170255112
Publication date
Sep 7, 2017
ASML NETHERLANDS B.V.
Adriaan Johan VAN LEEST
G01 - MEASURING TESTING