Martijn Petrus, Christianus VAN HEUMEN

Person

Santa Clara, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Particle beam inspection apparatus
- Patent number 12,354,891
- Issue date Jul 8, 2025
- ASML Netherlands B.V.
- Jeroen Gerard Gosen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fluid transfer system in a charged particle system
- Patent number 12,249,480
- Issue date Mar 11, 2025
- ASML Netherlands B.V.
- Marcus Adrianus Van De Kerkhof
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Systems and methods for thermally conditioning a wafer in a charged...
- Patent number 12,217,930
- Issue date Feb 4, 2025
- ASML Netherlands B.V.
- Martijn Petrus Christianus Van Heumen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fluid transfer system in a charged particle system
- Patent number 11,996,262
- Issue date May 28, 2024
- ASML Netherlands B.V.
- Marcus Adrianus Van De Kerkhof
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Particle beam inspection apparatus
- Patent number 11,942,340
- Issue date Mar 26, 2024
- ASML Netherlands B.V.
- Jeroen Gerard Gosen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and methods for thermally conditioning a wafer in a charged...
- Patent number 11,804,358
- Issue date Oct 31, 2023
- ASML Netherlands B.V.
- Martijn Petrus Christianus Van Heumen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods of cooling objective lens of a charged-particle...
- Patent number 11,764,027
- Issue date Sep 19, 2023
- ASML Netherlands B.V.
- Jeroen Gerard Gosen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle beam inspection apparatus
- Patent number 11,430,678
- Issue date Aug 30, 2022
- ASML Netherlands B.V.
- Jeroen Gerard Gosen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for thermally conditioning a wafer in a charged...
- Patent number 11,139,141
- Issue date Oct 5, 2021
- ASML Netherlands B.V.
- Martijn Petrus Christianus Van Heumen
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
FLUID TRANSFER SYSTEM IN A CHARGED PARTICLE SYSTEM
- Publication number 20240274400
- Publication date Aug 15, 2024
- ASML NETHERLANDS B.V.
- Marcus Adrianus VAN DE KERKHOF
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
PARTICLE BEAM INSPECTION APPARATUS
- Publication number 20240258138
- Publication date Aug 1, 2024
- ASML NETHERLANDS B.V.
- Jeroen Gerard GOSEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR THERMALLY CONDITIONING A WAFER IN A CHARGED...
- Publication number 20240079202
- Publication date Mar 7, 2024
- ASML NETHERLANDS B.V.
- Martijn Petrus, Christianus VAN HEUMEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM SYSTEM FOR MITIGATING DAMAGE DUE TO A VACUUM PUMP MALFUNCTION
- Publication number 20230332669
- Publication date Oct 19, 2023
- ASML NETHERLANDS B.V.
- Erheng WANG
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
PARTICLE BEAM INSPECTION APPARATUS
- Publication number 20220415678
- Publication date Dec 29, 2022
- ASML NETHERLANDS B.V.
- Jeroen Gerard GOSEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHODS FOR THERMALLY CONDITIONING A WAFER IN A CHARGED...
- Publication number 20220102106
- Publication date Mar 31, 2022
- ASML NETHERLANDS B.V.
- Martijn Petrus, Christianus VAN HEUMEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FLUID TRANSFER SYSTEM IN A CHARGED PARTICLE SYSTEM
- Publication number 20210257181
- Publication date Aug 19, 2021
- ASML NETHERLANDS B.V.
- Marcus Adrianus VAN DE KERKHOF
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS OF COLLING OBJECTIVE LENS OF A CHARGED-PARTICLE...
- Publication number 20200176215
- Publication date Jun 4, 2020
- ASML NETHERLANDS B.V.
- Jeroen Gosen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR THERMALLY CONDITIONING A WAFER IN A CHARGED...
- Publication number 20200144019
- Publication date May 7, 2020
- ASML NETHERLANDS B.V.
- Martijn Petrus, Christianus VAN HEUMEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARTICLE BEAM INSPECTION APPARATUS
- Publication number 20200027763
- Publication date Jan 23, 2020
- ASML Netherlands B.V.
- Jeroen Gerard GOSEN
- H01 - BASIC ELECTRIC ELEMENTS

Martijn Petrus, Christianus VAN HEUMEN

Person

Patents Grantslast 30 patents

Particle beam inspection apparatus

Fluid transfer system in a charged particle system

Systems and methods for thermally conditioning a wafer in a charged...

Fluid transfer system in a charged particle system

Particle beam inspection apparatus

System and methods for thermally conditioning a wafer in a charged...

Systems and methods of cooling objective lens of a charged-particle...

Particle beam inspection apparatus

Systems and methods for thermally conditioning a wafer in a charged...

Patents Applicationslast 30 patents

FLUID TRANSFER SYSTEM IN A CHARGED PARTICLE SYSTEM

PARTICLE BEAM INSPECTION APPARATUS

SYSTEMS AND METHODS FOR THERMALLY CONDITIONING A WAFER IN A CHARGED...

VACUUM SYSTEM FOR MITIGATING DAMAGE DUE TO A VACUUM PUMP MALFUNCTION

PARTICLE BEAM INSPECTION APPARATUS

SYSTEM AND METHODS FOR THERMALLY CONDITIONING A WAFER IN A CHARGED...

FLUID TRANSFER SYSTEM IN A CHARGED PARTICLE SYSTEM

SYSTEMS AND METHODS OF COLLING OBJECTIVE LENS OF A CHARGED-PARTICLE...

SYSTEMS AND METHODS FOR THERMALLY CONDITIONING A WAFER IN A CHARGED...

PARTICLE BEAM INSPECTION APPARATUS