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Martijn Petrus Christianus VAN HEUMEN
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Eindhoven, NL
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Patents Grants
last 30 patents
Information
Patent Grant
Laser-driven photon source and inspection apparatus including such...
Patent number
10,948,421
Issue date
Mar 16, 2021
ASML Netherlands B.V.
Martijn Petrus Christianus Van Heumen
G01 - MEASURING TESTING
Information
Patent Grant
Radiation source, metrology apparatus, lithographic system and devi...
Patent number
10,420,197
Issue date
Sep 17, 2019
ASML Netherlands B.V.
Martijn Petrus Christianus Van Heumen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Radiation source, metrology apparatus, lithographic system and devi...
Patent number
9,924,585
Issue date
Mar 20, 2018
ASML Netherlands B.V.
Martijn Petrus Christianus Van Heumen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Radiation source, metrology apparatus, lithographic system and devi...
Patent number
9,913,357
Issue date
Mar 6, 2018
ASML Netherlands B.V.
Martijn Petrus Christianus Van Heumen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Photon source, metrology apparatus, lithographic system and device...
Patent number
9,814,126
Issue date
Nov 7, 2017
ASML Netherlands B.V.
Martijn Petrus Christianus Van Heumen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Radiation Source, Metrology Apparatus, Lithographic System and Devi...
Publication number
20180160520
Publication date
Jun 7, 2018
ASML NETHERLANDS B.V.
Martijn Petrus Christianus VAN HEUMEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Laser-Driven Photon Source and Inspection Apparatus Including such...
Publication number
20170241914
Publication date
Aug 24, 2017
ASML NETHERLANDS B.V.
Martijn Petrus Christianus VAN HEUMEN
G01 - MEASURING TESTING
Information
Patent Application
RADIATION SOURCE, METROLOGY APPARATUS, LITHOGRAPHIC SYSTEM AND DEVI...
Publication number
20160316550
Publication date
Oct 27, 2016
ASML NETHERLANDS B.V.
Martijn Petrus Christianus VAN HEUMEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Photon Source, Metrology Apparatus, Lithographic System and Device...
Publication number
20160255710
Publication date
Sep 1, 2016
ASML NETHERLANDS B.V.
Martijn Petrus Christianus VAN HEUMEN
G01 - MEASURING TESTING