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Martijn Robert HAMERS
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's-Hertogenbosch, NL
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Patents Grants
last 30 patents
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Patent Grant
Encoder-type measurement system, lithographic apparatus and method...
Patent number
8,614,783
Issue date
Dec 24, 2013
ASML Netherlands B.V.
Emiel Jozef Melanie Eussen
G01 - MEASURING TESTING
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Patent Grant
Positioning system, method, and lithographic apparatus
Patent number
8,355,115
Issue date
Jan 15, 2013
ASML Netherlands B.V.
Robertus Leonardus Tousain
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
Lithographic apparatus and calibration method
Patent number
8,248,583
Issue date
Aug 21, 2012
ASML Netherlands B.V.
Marinus Aart Van Den Brink
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
POSITIONING SYSTEM, METHOD, AND LITHOGRAPHIC APPARATUS
Publication number
20100091262
Publication date
Apr 15, 2010
ASML NETHERLANDS B.V.
Robertus Leonardus Tousain
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic Apparatus and Calibration Method
Publication number
20100007867
Publication date
Jan 14, 2010
ASML NETHERLANDS B.V.
Marinus Aart VAN DEN BRINK
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ENCODER-TYPE MEASUREMENT SYSTEM, LITHOGRAPHIC APPARATUS AND METHOD...
Publication number
20090237634
Publication date
Sep 24, 2009
ASML NETHERLANDS B.V.
Emiel Jozef Melanie EUSSEN
G01 - MEASURING TESTING