Martin A. HILKENE

Person

Gilroy, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method and hardware for post maintenance vacuum recovery system
- Patent number 12,072,267
- Issue date Aug 27, 2024
- Applied Materials, Inc.
- Martin A. Hilkene
- C30 - CRYSTAL GROWTH
Information Patent Grant
Multi-thermal CVD chambers with shared gas delivery and exhaust system
- Patent number 12,037,701
- Issue date Jul 16, 2024
- Applied Materials, Inc.
- Zhiyuan Ye
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and system for foreline deposition diagnostics and control
- Patent number 11,860,973
- Issue date Jan 2, 2024
- Applied Materials, Inc.
- Ala Moradian
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Enhanced process and hardware architecture to detect and correct re...
- Patent number 11,735,447
- Issue date Aug 22, 2023
- Applied Materials, Inc.
- Kartik Santhanam
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Rapid chamber vacuum leak check hardware and maintenance routine
- Patent number 11,635,338
- Issue date Apr 25, 2023
- Applied Materials, Inc.
- Martin A. Hilkene
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Diode laser for wafer heating for EPI processes
- Patent number 11,171,023
- Issue date Nov 9, 2021
- Applied Materials, Inc.
- Schubert S. Chu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature controlled remote plasma clean for exhaust deposit removal
- Patent number 10,500,614
- Issue date Dec 10, 2019
- Applied Materials, Inc.
- Martin A. Hilkene
- C30 - CRYSTAL GROWTH
Information Patent Grant
Material deposition for high aspect ratio structures
- Patent number 10,276,369
- Issue date Apr 30, 2019
- Applied Materials, Inc.
- Jun Xue
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Demagnetization of magnetic media by C doping for HDD patterned med...
- Patent number 10,233,538
- Issue date Mar 19, 2019
- Applied Materials, Inc.
- Martin A. Hilkene
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Material deposition for high aspect ratio structures
- Patent number 9,852,902
- Issue date Dec 26, 2017
- Applied Materials, Inc.
- Jun Xue
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Resist fortification for magnetic media patterning
- Patent number 9,646,642
- Issue date May 9, 2017
- Applied Materials, Inc.
- Christopher Dennis Bencher
- G11 - INFORMATION STORAGE
Information Patent Grant
Conversion process utilized for manufacturing advanced 3D features...
- Patent number 9,553,174
- Issue date Jan 24, 2017
- Applied Materials, Inc.
- Ludovic Godet
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Surface stabilization process to reduce dopant diffusion
- Patent number 9,390,930
- Issue date Jul 12, 2016
- Applied Materials, Inc.
- Matthew S. Rogers
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Demagnetization of magnetic media by C doping for HDD patterned med...
- Patent number 9,376,746
- Issue date Jun 28, 2016
- Applied Materials, Inc.
- Martin A. Hilkene
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for substrate surface planarization during magnetic pattern...
- Patent number 8,673,162
- Issue date Mar 18, 2014
- Applied Materials, Inc.
- Roman Gouk
- G11 - INFORMATION STORAGE
Information Patent Grant
Resist fortification for magnetic media patterning
- Patent number 8,658,242
- Issue date Feb 25, 2014
- Applied Materials, Inc.
- Christopher D. Bencher
- G11 - INFORMATION STORAGE
Information Patent Grant
Temperature control of a substrate during a plasma ion implantation...
- Patent number 8,586,952
- Issue date Nov 19, 2013
- Applied Materials, Inc.
- Martin A. Hilkene
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Methods and apparatus for conformal doping
- Patent number 8,501,605
- Issue date Aug 6, 2013
- Applied Materials, Inc.
- Kartik Santhanam
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for quantitative measurement of a plasma immersion process
- Patent number 8,492,177
- Issue date Jul 23, 2013
- Applied Materials, Inc.
- Daping Yao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for removing implanted photo resist from hard disk drive sub...
- Patent number 8,354,035
- Issue date Jan 15, 2013
- Applied Materials, Inc.
- Martin A. Hilkene
- G11 - INFORMATION STORAGE
Information Patent Grant
Plasma immersion ion implantation process with chamber seasoning an...
- Patent number 8,003,500
- Issue date Aug 23, 2011
- Applied Materials, Inc.
- Manoj Vellaikal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Removal of surface dopants from a substrate
- Patent number 7,989,329
- Issue date Aug 2, 2011
- Applied Materials, Inc.
- Kartik Ramaswamy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reducing photoresist layer degradation in plasma immersion ion impl...
- Patent number 7,968,401
- Issue date Jun 28, 2011
- Applied Materials, Inc.
- Martin A. Hilkene
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam guide tube
- Patent number 7,872,247
- Issue date Jan 18, 2011
- Applied Materials, Inc.
- Geoffrey Ryding
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implanters
- Patent number 7,807,984
- Issue date Oct 5, 2010
- Applied Materials, Inc.
- Gregory Robert Alcott
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma immersion ion implantation process with chamber seasoning an...
- Patent number 7,659,184
- Issue date Feb 9, 2010
- Applied Materials, Inc.
- Manoj Vellaikal
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CHAMBER MOISTURE CONTROL USING NARROW OPTICAL FILTERS MEASURING EMI...
- Publication number 20240385109
- Publication date Nov 21, 2024
- Applied Materials, Inc.
- Sven Schramm
- G01 - MEASURING TESTING
Information Patent Application
INDIRECT PLASMA HEALTH MONITORING
- Publication number 20240321564
- Publication date Sep 26, 2024
- Applied Materials, Inc.
- Tobin Kaufman-Osborn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-THERMAL CVD CHAMBERS WITH SHARED GAS DELIVERY AND EXHAUST SYSTEM
- Publication number 20240318351
- Publication date Sep 26, 2024
- Applied Materials, Inc.
- Zhiyuan YE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RADICAL SENSOR SUBSTRATE
- Publication number 20240035896
- Publication date Feb 1, 2024
- Applied Materials, Inc.
- CHUANG-CHIA LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD TO MEASURE RADICAL ION FLUX USING A MODIFIED PIRANI VACUUM G...
- Publication number 20230187169
- Publication date Jun 15, 2023
- Applied Materials, Inc.
- Martin Hilkene
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCANNING RADICAL SENSOR USABLE FOR MODEL TRAINING
- Publication number 20230178346
- Publication date Jun 8, 2023
- Applied Materials, Inc.
- Stephen Moffatt
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD TO ELIMINATE FIRST WAFER EFFECTS ON SEMICONDUCTOR PROCESS CH...
- Publication number 20230163001
- Publication date May 25, 2023
- Applied Materials, Inc.
- Martin Hilkene
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR DETECTION USING OPTICAL EMISSION SPECTROSCOPY
- Publication number 20220283029
- Publication date Sep 8, 2022
- Applied Materials, Inc.
- Zuoming ZHU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RAPID CHAMBER VACUUM LEAK CHECK HARDWARE AND MAINTENANCE ROUTINE
- Publication number 20220128425
- Publication date Apr 28, 2022
- Applied Materials, Inc.
- Martin A. HILKENE
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND SYSTEM FOR FORELINE DEPOSITION DIAGNOSTICS AND CONTROL
- Publication number 20220129698
- Publication date Apr 28, 2022
- Applied Materials, Inc.
- Ala MORADIAN
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
ENHANCED PROCESS AND HARDWARE ARCHITECTURE TO DETECT AND CORRECT RE...
- Publication number 20220122865
- Publication date Apr 21, 2022
- Kartik Santhanam
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
ATOMIC OXYGEN DETECTION IN SEMICONDUCTOR PROCESSING CHAMBERS
- Publication number 20220093428
- Publication date Mar 24, 2022
- Applied Materials, Inc.
- Bruce E. Adams
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ANTIFRAGILE SYSTEMS FOR SEMICONDUCTOR PROCESSING EQUIPMENT USING MU...
- Publication number 20220084842
- Publication date Mar 17, 2022
- Applied Materials, Inc.
- Martin Hilkene
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND HARDWARE FOR POST MAINTENANCE VACUUM RECOVERY SYSTEM
- Publication number 20220065735
- Publication date Mar 3, 2022
- Applied Materials Inc.
- Martin A. Hilkene
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-THERMAL CVD CHAMBERS WITH SHARED GAS DELIVERY AND EXHAUST SYSTEM
- Publication number 20210324514
- Publication date Oct 21, 2021
- Applied Materials, Inc.
- Zhiyuan YE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING CHAMBER FOR THERMAL PROCESSES
- Publication number 20200373195
- Publication date Nov 26, 2020
- Applied Materials, Inc.
- Shu-Kwan Lau
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MATERIAL DEPOSITION FOR HIGH ASPECT RATIO STRUCTURES
- Publication number 20180102248
- Publication date Apr 12, 2018
- Applied Materials, Inc.
- Jun Xue
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TEMPERATURE CONTROLLED REMOTE PLASMA CLEAN FOR EXHAUST DEPOSIT REMOVAL
- Publication number 20170304877
- Publication date Oct 26, 2017
- Applied Materials, Inc.
- Martin A. HILKENE
- C30 - CRYSTAL GROWTH
Information Patent Application
RESIST FORTIFICATION FOR MAGNETIC MEDIA PATTERNING
- Publication number 20170206922
- Publication date Jul 20, 2017
- Applied Materials, Inc.
- Christopher Dennis BENCHER
- G11 - INFORMATION STORAGE
Information Patent Application
DIODE LASER FOR WAFER HEATING FOR EPI PROCESSES
- Publication number 20170103907
- Publication date Apr 13, 2017
- Applied Materials, Inc.
- Schubert S. CHU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEMAGNETIZATION OF MAGNETIC MEDIA BY C DOPING FOR HDD PATTERNED MED...
- Publication number 20160305013
- Publication date Oct 20, 2016
- Applied Materials, Inc.
- Martin A. HILKENE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MATERIAL DEPOSITION FOR HIGH ASPECT RATIO STRUCTURES
- Publication number 20160099154
- Publication date Apr 7, 2016
- Applied Materials, Inc.
- Jun Xue
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONVERSION PROCESS UTILIZED FOR MANUFACTURING ADVANCED 3D FEATURES...
- Publication number 20150279974
- Publication date Oct 1, 2015
- Applied Materials, Inc.
- Ludovic GODET
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CARBON FILM HARDMASK STRESS REDUCTION BY HYDROGEN ION IMPLANTATION
- Publication number 20140273461
- Publication date Sep 18, 2014
- Applied Materials, Inc.
- Kwangduk Douglas LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Plasma Doping Of Silicon-Containing Films
- Publication number 20140273524
- Publication date Sep 18, 2014
- Victor Nguyen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RESIST FORTIFICATION FOR MAGNETIC MEDIA PATTERNING
- Publication number 20140147700
- Publication date May 29, 2014
- Applied Materials, Inc.
- Christopher Dennis BENCHER
- G11 - INFORMATION STORAGE
Information Patent Application
METHODS AND APPARATUS FOR IMPLANTING A DOPANT MATERIAL
- Publication number 20130288469
- Publication date Oct 31, 2013
- Applied Materials, Inc.
- SHASHANK SHARMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEMAGNETIZATION OF MAGNETIC MEDIA BY C DOPING FOR HDD PATTERNED MED...
- Publication number 20130164455
- Publication date Jun 27, 2013
- Martin A. Hilkene
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR QUANTITATIVE MEASUREMENT OF A PLASMA IMMERSION PROCESS
- Publication number 20130137197
- Publication date May 30, 2013
- Applied Materials, Inc.
- DAPING YAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SURFACE STABILIZATION PROCESS TO REDUCE DOPANT DIFFUSION
- Publication number 20130109162
- Publication date May 2, 2013
- Applied Materials, Inc.
- Matthew S. Rogers
- H01 - BASIC ELECTRIC ELEMENTS

Martin A. HILKENE

Person

Patents Grantslast 30 patents

Method and hardware for post maintenance vacuum recovery system

Multi-thermal CVD chambers with shared gas delivery and exhaust system

Method and system for foreline deposition diagnostics and control

Enhanced process and hardware architecture to detect and correct re...

Rapid chamber vacuum leak check hardware and maintenance routine

Diode laser for wafer heating for EPI processes

Temperature controlled remote plasma clean for exhaust deposit removal

Material deposition for high aspect ratio structures

Demagnetization of magnetic media by C doping for HDD patterned med...

Material deposition for high aspect ratio structures

Resist fortification for magnetic media patterning

Conversion process utilized for manufacturing advanced 3D features...

Surface stabilization process to reduce dopant diffusion

Demagnetization of magnetic media by C doping for HDD patterned med...

Methods for substrate surface planarization during magnetic pattern...

Resist fortification for magnetic media patterning

Temperature control of a substrate during a plasma ion implantation...

Methods and apparatus for conformal doping

Methods for quantitative measurement of a plasma immersion process

Method for removing implanted photo resist from hard disk drive sub...

Plasma immersion ion implantation process with chamber seasoning an...

Removal of surface dopants from a substrate

Reducing photoresist layer degradation in plasma immersion ion impl...

Ion beam guide tube

Ion implanters

Plasma immersion ion implantation process with chamber seasoning an...

Patents Applicationslast 30 patents

CHAMBER MOISTURE CONTROL USING NARROW OPTICAL FILTERS MEASURING EMI...

INDIRECT PLASMA HEALTH MONITORING

MULTI-THERMAL CVD CHAMBERS WITH SHARED GAS DELIVERY AND EXHAUST SYSTEM

RADICAL SENSOR SUBSTRATE

METHOD TO MEASURE RADICAL ION FLUX USING A MODIFIED PIRANI VACUUM G...

SCANNING RADICAL SENSOR USABLE FOR MODEL TRAINING

METHOD TO ELIMINATE FIRST WAFER EFFECTS ON SEMICONDUCTOR PROCESS CH...

METHODS FOR DETECTION USING OPTICAL EMISSION SPECTROSCOPY

RAPID CHAMBER VACUUM LEAK CHECK HARDWARE AND MAINTENANCE ROUTINE

METHOD AND SYSTEM FOR FORELINE DEPOSITION DIAGNOSTICS AND CONTROL

ENHANCED PROCESS AND HARDWARE ARCHITECTURE TO DETECT AND CORRECT RE...

ATOMIC OXYGEN DETECTION IN SEMICONDUCTOR PROCESSING CHAMBERS

ANTIFRAGILE SYSTEMS FOR SEMICONDUCTOR PROCESSING EQUIPMENT USING MU...

METHOD AND HARDWARE FOR POST MAINTENANCE VACUUM RECOVERY SYSTEM

MULTI-THERMAL CVD CHAMBERS WITH SHARED GAS DELIVERY AND EXHAUST SYSTEM

PROCESSING CHAMBER FOR THERMAL PROCESSES

MATERIAL DEPOSITION FOR HIGH ASPECT RATIO STRUCTURES

TEMPERATURE CONTROLLED REMOTE PLASMA CLEAN FOR EXHAUST DEPOSIT REMOVAL

RESIST FORTIFICATION FOR MAGNETIC MEDIA PATTERNING

DIODE LASER FOR WAFER HEATING FOR EPI PROCESSES

DEMAGNETIZATION OF MAGNETIC MEDIA BY C DOPING FOR HDD PATTERNED MED...

MATERIAL DEPOSITION FOR HIGH ASPECT RATIO STRUCTURES

CONVERSION PROCESS UTILIZED FOR MANUFACTURING ADVANCED 3D FEATURES...

CARBON FILM HARDMASK STRESS REDUCTION BY HYDROGEN ION IMPLANTATION

Plasma Doping Of Silicon-Containing Films

RESIST FORTIFICATION FOR MAGNETIC MEDIA PATTERNING

METHODS AND APPARATUS FOR IMPLANTING A DOPANT MATERIAL

DEMAGNETIZATION OF MAGNETIC MEDIA BY C DOPING FOR HDD PATTERNED MED...

METHODS FOR QUANTITATIVE MEASUREMENT OF A PLASMA IMMERSION PROCESS

SURFACE STABILIZATION PROCESS TO REDUCE DOPANT DIFFUSION