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Martin Brunotte
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Aalen, DE
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Patents Grants
last 30 patents
Information
Patent Grant
Objective with fluoride crystal lenses
Patent number
7,382,536
Issue date
Jun 3, 2008
Carl Zeiss SMT AG
Daniel Krähmer
G02 - OPTICS
Information
Patent Grant
Objective with fluoride crystal lenses
Patent number
7,180,667
Issue date
Feb 20, 2007
Carl Zeiss SMT AG
Daniel Krähmer
G02 - OPTICS
Information
Patent Grant
Projection lens and microlithographic projection exposure apparatus
Patent number
7,170,585
Issue date
Jan 30, 2007
Carl Zeiss SMT AG
Martin Brunotte
G02 - OPTICS
Information
Patent Grant
Objective with fluoride crystal lenses
Patent number
7,145,720
Issue date
Dec 5, 2006
Carl Zeiss SMT AG
Daniel Krähmer
G02 - OPTICS
Information
Patent Grant
Objective with fluoride crystal lenses
Patent number
7,126,765
Issue date
Oct 24, 2006
Carl Zeiss SMT AG
Daniel Krähmer
G02 - OPTICS
Information
Patent Grant
Projection lens and microlithographic projection exposure apparatus
Patent number
6,879,379
Issue date
Apr 12, 2005
Carl Zeiss SMT AG
Martin Brunotte
G02 - OPTICS
Information
Patent Grant
Collector module
Patent number
6,817,357
Issue date
Nov 16, 2004
Schott Glas
Martin Brunotte
F24 - HEATING RANGES VENTILATING
Patents Applications
last 30 patents
Information
Patent Application
Objective with fluoride crystal lenses
Publication number
20060171020
Publication date
Aug 3, 2006
Carl Zeiss SMT AG
Daniel Krahmer
G02 - OPTICS
Information
Patent Application
Projection lens and microlithographic projection exposure apparatus
Publication number
20050264786
Publication date
Dec 1, 2005
Martin Brunotte
G02 - OPTICS
Information
Patent Application
Catadioptric reduction objective
Publication number
20050190446
Publication date
Sep 1, 2005
CARL ZEISS AMT AG
Birgit Kuerz
G02 - OPTICS
Information
Patent Application
PROJECTION LENS AND MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS
Publication number
20050134967
Publication date
Jun 23, 2005
Carl Zeiss SMT AG
Martin Brunotte
G02 - OPTICS
Information
Patent Application
Objective with fluoride crystal lenses
Publication number
20050122594
Publication date
Jun 9, 2005
Carl Zeiss SMT AG, a Germany corporation
Daniel Krahmer
G02 - OPTICS
Information
Patent Application
Retardation element made from cubic crystal and an optical system t...
Publication number
20040218271
Publication date
Nov 4, 2004
Carl Zeiss SMT AG
Juergen Hartmaier
G02 - OPTICS
Information
Patent Application
Objective with fluoride crystal lenses
Publication number
20040190151
Publication date
Sep 30, 2004
Daniel Krahmer
G02 - OPTICS
Information
Patent Application
Projection lens and microlithographic projection exposure apparatus
Publication number
20040150806
Publication date
Aug 5, 2004
Martin Brunotte
G02 - OPTICS
Information
Patent Application
Objective with fluoride crystal lenses
Publication number
20040105170
Publication date
Jun 3, 2004
Carl Zeiss SMT AG
Daniel Krahmer
G02 - OPTICS
Information
Patent Application
Collector module
Publication number
20040050542
Publication date
Mar 18, 2004
Martin Brunotte
F24 - HEATING RANGES VENTILATING