Martin Burkhardt

Person

White Plains, NY, US

People

Patents Grantslast 30 patents

Information Patent Grant
Automatic feature extraction from aerial images for test pattern sa...
- Patent number 11,301,748
- Issue date Apr 12, 2022
- International Business Machines Corporation
- Jing Sha
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Generative adversarial networks for generating physical design layo...
- Patent number 10,706,200
- Issue date Jul 7, 2020
- International Business Machines Corporation
- Jing Sha
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Generative adversarial networks for generating physical design layo...
- Patent number 10,699,055
- Issue date Jun 30, 2020
- International Business Machines Corporation
- Jing Sha
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Classification and localization of hotspots in integrated physical...
- Patent number 10,621,302
- Issue date Apr 14, 2020
- International Business Machines Corporation
- Jing Sha
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Generation of hotspot-containing physical design layout patterns
- Patent number 10,539,881
- Issue date Jan 21, 2020
- International Business Machines Corporation
- Jing Sha
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
EUV mask for monitoring focus in EUV lithography
- Patent number 10,012,898
- Issue date Jul 3, 2018
- International Business Machines Corporation
- Timothy Allan Brunner
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for monitoring focus in EUV lithography
- Patent number 9,921,466
- Issue date Mar 20, 2018
- International Business Machines Corporation
- Timothy Allan Brunner
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for monitoring focus in EUV lithography
- Patent number 9,588,440
- Issue date Mar 7, 2017
- International Business Machines Corporation
- Timothy Allan Brunner
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Structure and method for fixing phase effects on EUV mask
- Patent number 9,551,924
- Issue date Jan 24, 2017
- International Business Machines Corporation
- Martin Burkhardt
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Image optimization using pupil filters in projecting printing syste...
- Patent number 9,261,793
- Issue date Feb 16, 2016
- GLOBALFOUNDRIES Inc.
- Gregory R. McIntyre
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Process of multiple exposures with spin castable films
- Patent number 9,058,997
- Issue date Jun 16, 2015
- International Business Machines Corporation
- Martin Burkhardt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method to print contact holes at high resolution
- Patent number 8,927,198
- Issue date Jan 6, 2015
- International Business Machines Corporation
- Martin Burkhardt
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of forming a semiconductor device having a cut-way hole to e...
- Patent number 8,507,346
- Issue date Aug 13, 2013
- International Business Machines Corporation
- Martin Burkhardt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pitch-based subresolution assist feature design
- Patent number 6,964,032
- Issue date Nov 8, 2005
- International Business Machines Corporation
- Lars W. Liebmann
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatus for amplitude filtering in the frequency plane...
- Patent number 6,940,583
- Issue date Sep 6, 2005
- International Business Machines Corporation
- Shahid Butt
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
MACHINE LEARNING SYSTEM DESIGNS FOR PATTERNING MODELS WITH ONLINE A...
- Publication number 20230087777
- Publication date Mar 23, 2023
- International Business Machines Corporation
- Jing Sha
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
AUTOMATIC FEATURE EXTRACTION FROM AERIAL IMAGES FOR TEST PATTERN SA...
- Publication number 20200151538
- Publication date May 14, 2020
- International Business Machines Corporation
- Jing Sha
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
CLASSIFICATION AND LOCALIZATION OF HOTSPOTS IN INTEGRATED PHYSICAL...
- Publication number 20200004918
- Publication date Jan 2, 2020
- International Business Machines Corporation
- Jing Sha
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
GENERATIVE ADVERSARIAL NETWORKS FOR GENERATING PHYSICAL DESIGN LAYO...
- Publication number 20190377849
- Publication date Dec 12, 2019
- International Business Machines Corporation
- Jing Sha
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
GENERATIVE ADVERSARIAL NETWORKS FOR GENERATING PHYSICAL DESIGN LAYO...
- Publication number 20190370432
- Publication date Dec 5, 2019
- International Business Machines Corporation
- Jing Sha
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
EUV MASK FOR MONITORING FOCUS IN EUV LITHOGRAPHY
- Publication number 20180074395
- Publication date Mar 15, 2018
- International Business Machines Corporation
- Timothy Allan Brunner
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR MONITORING FOCUS IN EUV LITHOGRAPHY
- Publication number 20170192364
- Publication date Jul 6, 2017
- International Business Machines Corporation
- Timothy Allan Brunner
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR MONITORING FOCUS IN EUV LITHOGRAPHY
- Publication number 20160238939
- Publication date Aug 18, 2016
- International Business Machines Corporation
- Timothy Allan Brunner
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
STRUCTURE AND METHOD FOR FIXING PHASE EFFECTS ON EUV MASK
- Publication number 20160238924
- Publication date Aug 18, 2016
- International Business Machines Corporation
- Martin Burkhardt
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD TO PRINT CONTACT HOLES AT HIGH RESOLUTION
- Publication number 20140199615
- Publication date Jul 17, 2014
- International Business Machines Corporation
- Martin Burkhardt
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMAGE OPTIMIZATION USING PUPIL FILTERS IN PROJECTING PRINTING SYSTE...
- Publication number 20140078479
- Publication date Mar 20, 2014
- International Business Machines Corporation
- Gregory R. McIntyre
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
WAFER FILL PATTERNS AND USES
- Publication number 20130181267
- Publication date Jul 18, 2013
- International Business Machines Corporation
- Martin Burkhardt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Process of Multiple Exposures With Spin Castable Films
- Publication number 20120214311
- Publication date Aug 23, 2012
- International Business Machines Corporation
- Martin Burkhardt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER FILL PATTERNS AND USES
- Publication number 20120126294
- Publication date May 24, 2012
- International Business Machines Corporation
- Martin Burkhardt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Process of multiple exposures with spin castable film
- Publication number 20090104566
- Publication date Apr 23, 2009
- International Business Machines Corporation
- Martin Burkhardt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OPTICAL PROXIMITY CORRECTION IMPROVEMENT BY FRACTURING AFTER PRE-OP...
- Publication number 20080320435
- Publication date Dec 25, 2008
- International Business Machines Corporation
- MARTIN BURKHARDT
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
OPTICAL PROXIMITY CORRECTION IMPROVEMENT BY FRACTURING AFTER PRE-OP...
- Publication number 20080168419
- Publication date Jul 10, 2008
- International Business Machines Corporation
- MARTIN BURKHARDT
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND APPARATUS FOR AMPLITUDE FILTERING IN THE FREQUENCY PLANE...
- Publication number 20050024618
- Publication date Feb 3, 2005
- International Business Machines Corporation
- Shahid Butt
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Pitch-based subresolution assist feature design
- Publication number 20040172610
- Publication date Sep 2, 2004
- International Business Machines Corporation
- Lars W. Liebmann
- G06 - COMPUTING CALCULATING COUNTING

Martin Burkhardt

Person

Patents Grantslast 30 patents

Automatic feature extraction from aerial images for test pattern sa...

Generative adversarial networks for generating physical design layo...

Generative adversarial networks for generating physical design layo...

Classification and localization of hotspots in integrated physical...

Generation of hotspot-containing physical design layout patterns

EUV mask for monitoring focus in EUV lithography

Method for monitoring focus in EUV lithography

Method for monitoring focus in EUV lithography

Structure and method for fixing phase effects on EUV mask

Image optimization using pupil filters in projecting printing syste...

Process of multiple exposures with spin castable films

Method to print contact holes at high resolution

Method of forming a semiconductor device having a cut-way hole to e...

Pitch-based subresolution assist feature design

Method and apparatus for amplitude filtering in the frequency plane...

Patents Applicationslast 30 patents

MACHINE LEARNING SYSTEM DESIGNS FOR PATTERNING MODELS WITH ONLINE A...

AUTOMATIC FEATURE EXTRACTION FROM AERIAL IMAGES FOR TEST PATTERN SA...

CLASSIFICATION AND LOCALIZATION OF HOTSPOTS IN INTEGRATED PHYSICAL...

GENERATIVE ADVERSARIAL NETWORKS FOR GENERATING PHYSICAL DESIGN LAYO...

GENERATIVE ADVERSARIAL NETWORKS FOR GENERATING PHYSICAL DESIGN LAYO...

EUV MASK FOR MONITORING FOCUS IN EUV LITHOGRAPHY

METHOD FOR MONITORING FOCUS IN EUV LITHOGRAPHY

METHOD FOR MONITORING FOCUS IN EUV LITHOGRAPHY

STRUCTURE AND METHOD FOR FIXING PHASE EFFECTS ON EUV MASK

METHOD TO PRINT CONTACT HOLES AT HIGH RESOLUTION

IMAGE OPTIMIZATION USING PUPIL FILTERS IN PROJECTING PRINTING SYSTE...

WAFER FILL PATTERNS AND USES

Process of Multiple Exposures With Spin Castable Films

WAFER FILL PATTERNS AND USES

Process of multiple exposures with spin castable film

OPTICAL PROXIMITY CORRECTION IMPROVEMENT BY FRACTURING AFTER PRE-OP...

OPTICAL PROXIMITY CORRECTION IMPROVEMENT BY FRACTURING AFTER PRE-OP...

METHOD AND APPARATUS FOR AMPLITUDE FILTERING IN THE FREQUENCY PLANE...

Pitch-based subresolution assist feature design