Martin E. Freeborn

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San Jose, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus and method for deposition and etch in gap fill
- Patent number 10,957,514
- Issue date Mar 23, 2021
- Lam Research Corporation
- Akhil Singhal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for deposition and etch in gap fill
- Patent number 10,373,806
- Issue date Aug 6, 2019
- Lam Research Corporation
- Akhil Singhal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for deposition and etch in gap fill
- Patent number 9,773,643
- Issue date Sep 26, 2017
- Lam Research Corporation
- Akhil Singhal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS AND METHOD FOR DEPOSITION AND ETCH IN GAP FILL
- Publication number 20190385820
- Publication date Dec 19, 2019
- LAM RESEARCH CORPORATION
- Akhil Singhal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR DEPOSITION AND ETCH IN GAP FILL
- Publication number 20180005801
- Publication date Jan 4, 2018
- LAM RESEARCH CORPORATION
- Akhil Singhal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR UNIFORM IRRADIATION USING SECONDARY IRRADI...
- Publication number 20150163860
- Publication date Jun 11, 2015
- LAM RESEARCH CORPORATION
- Vincent E. Burkhart
- G02 - OPTICS