Martin E. Lee

Person

Santa Clara County, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Projection optical device and exposure apparatus
- Patent number 8,767,172
- Issue date Jul 1, 2014
- Nikon Corporation
- Akimitsu Ebihara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Positioning device having dynamically isolated frame, and lithograp...
- Patent number 7,365,513
- Issue date Apr 29, 2008
- Nikon Corporation
- Martin E. Lee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Moving mechanism with high bandwidth response and low force transmi...
- Patent number 7,333,179
- Issue date Feb 19, 2008
- Nikon Corporation
- Bausan Yuan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Image adjustor including damping assembly
- Patent number 7,061,577
- Issue date Jun 13, 2006
- Nikon Corporation
- Bausan Yuan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Positioning device having dynamically isolated frame, and lithograp...
- Patent number 6,989,647
- Issue date Jan 24, 2006
- Nikon Corporation
- Martin E. Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Positioning device having dynamically isolated frame, and lithograp...
- Patent number 6,927,840
- Issue date Aug 9, 2005
- Nikon Corporation
- Martin E. Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for holding a device with minimal deformation
- Patent number 6,888,620
- Issue date May 3, 2005
- Nikon Corporation
- Martin E. Lee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Holder mover for a stage assembly
- Patent number 6,882,126
- Issue date Apr 19, 2005
- Nikon Corporation
- Douglas C. Watson
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Platform positioning system
- Patent number 6,872,958
- Issue date Mar 29, 2005
- Multibeam Systems, Inc.
- Gerry B. Andeen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection tool for testing and adjusting a projection unit of a li...
- Patent number H2114
- Issue date Feb 1, 2005
- Nikon Corporation
- W. Thomas Novak
- 356 - Optics: measuring and testing
Information Patent Grant
Guideless stage with isolated reaction stage
- Patent number 6,841,965
- Issue date Jan 11, 2005
- Nikon Corporation
- Martin E. Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of making exposure apparatus with dynamically isolated react...
- Patent number 6,747,732
- Issue date Jun 8, 2004
- Nikon Corporation
- Martin E. Lee
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Exposure apparatus and method utilizing isolated reaction frame
- Patent number 6,683,433
- Issue date Jan 27, 2004
- Nikon Corporation
- Martin E. Lee
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Support assembly for an exposure apparatus
- Patent number 6,646,719
- Issue date Nov 11, 2003
- Nikon Corporation
- Martin E. Lee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Active vibration isolation system having pressure control
- Patent number 6,590,639
- Issue date Jul 8, 2003
- Nikon Corporation
- Bausan Yuan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Flexural joint
- Patent number 6,471,435
- Issue date Oct 29, 2002
- Multibeam Systems, Inc.
- Martin E. Lee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Precision stage
- Patent number 6,355,994
- Issue date Mar 12, 2002
- Multibeam Systems, Inc.
- Gerry B. Andeen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Vertical direction force transducer
- Patent number 6,323,494
- Issue date Nov 27, 2001
- Nikon Corporation
- Martin E. Lee
- F15 - FLUID-PRESSURE ACTUATORS HYDRAULICS OR PNEUMATICS IN GENERAL
Information Patent Grant
Exposure apparatus and method utilizing isolated reaction frame
- Patent number 6,316,901
- Issue date Nov 13, 2001
- Nikon Corporation
- Martin E. Lee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Two Axis stage with arcuate surface bearings
- Patent number 6,302,585
- Issue date Oct 16, 2001
- Nikon Corporation
- Martin E. Lee
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Method for making apparatus with dynamic support structure isolatio...
- Patent number 6,281,654
- Issue date Aug 28, 2001
- Nikon Corporation
- Martin E. Lee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus having reaction frame
- Patent number 6,271,640
- Issue date Aug 7, 2001
- Nikon Corporation
- Martin E. Lee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of making exposure apparatus with dynamically isolated react...
- Patent number 6,246,202
- Issue date Jun 12, 2001
- Nikon Corporation
- Martin E. Lee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure method, and method of making exposure apparatus having dyn...
- Patent number 6,188,195
- Issue date Feb 13, 2001
- Nikon Corporation
- Martin E. Lee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus having dynamically isolated reaction frame
- Patent number 6,175,404
- Issue date Jan 16, 2001
- Nikon Corporation
- Martin E. Lee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus having dynamically isolated reaction frame
- Patent number 6,150,787
- Issue date Nov 21, 2000
- Nikon Corporation
- Martin E. Lee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus having dynamically isolated support structure
- Patent number 6,151,105
- Issue date Nov 21, 2000
- Nikon Corporation
- Martin E. Lee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
X-Y stage with arcuate surface bearings
- Patent number 6,132,091
- Issue date Oct 17, 2000
- Nikon Corporation
- Martin E. Lee
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
X-Y stage with movable magnet plate
- Patent number 6,130,490
- Issue date Oct 10, 2000
- Nikon Corporation
- Martin E. Lee
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Exposure method, and method of making exposure apparatus having dyn...
- Patent number 6,087,797
- Issue date Jul 11, 2000
- Nikon Corporation
- Martin E. Lee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Projection optical device and exposure apparatus
- Publication number 20110043781
- Publication date Feb 24, 2011
- Nikon Corporation
- Akimitsu Ebihara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Positioning device having dynamically isolated frame, and lithograp...
- Publication number 20080180053
- Publication date Jul 31, 2008
- Nikon Corporation
- Martin E. Lee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Projection Optical Device And Exposure Apparatus
- Publication number 20080068568
- Publication date Mar 20, 2008
- Nikon Corporation
- Akimitsu Ebihara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Anti-Gravity Device for Supporting Weight and Reducing Transmissibi...
- Publication number 20070236854
- Publication date Oct 11, 2007
- Martin E. Lee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Low spring constant, pneumatic suspension with vacuum chamber, air...
- Publication number 20070030462
- Publication date Feb 8, 2007
- Nikon Corporation
- Bausan Yuan
- G02 - OPTICS
Information Patent Application
Moving mechanism with high bandwidth response and low force transmi...
- Publication number 20060033903
- Publication date Feb 16, 2006
- Nikon Corporation
- Bausan Yuan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Real-time through lens image measurement system and method
- Publication number 20050286050
- Publication date Dec 29, 2005
- Nikon Corporation
- Bausan Yuan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Positioning device having dynamically isolated frame, and lithograp...
- Publication number 20050002009
- Publication date Jan 6, 2005
- Nikon Corporation
- Martin E. Lee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
WINDOW FRAME-GUIDED STAGE MECHANISM
- Publication number 20040095085
- Publication date May 20, 2004
- NIKON CORPORATION
- Martin E. Lee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Image adjustor including damping assembly
- Publication number 20040046947
- Publication date Mar 11, 2004
- Bausan Yuan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Holder mover for a stage assembly
- Publication number 20030098664
- Publication date May 29, 2003
- Douglas C. Watson
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
System and method for holding a device with minimal deformation
- Publication number 20030098964
- Publication date May 29, 2003
- Martin E. Lee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Sheet coils and linear motors comprising same, and stage units and...
- Publication number 20030080631
- Publication date May 1, 2003
- NIKON CORPORATION
- Shigeki Kageyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and apparatus for increasing flow capacity associated with a...
- Publication number 20030008532
- Publication date Jan 9, 2003
- Bau-San Yuan
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
Multiple point support assembly for a stage
- Publication number 20020137358
- Publication date Sep 26, 2002
- Mike Binnard
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Application
Platform positioning system
- Publication number 20020127050
- Publication date Sep 12, 2002
- Gerry B. Andeen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Wafer stage assembly
- Publication number 20020109823
- Publication date Aug 15, 2002
- NIKON CORPORATION
- Michael Binnard
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Application
Air bearing assembly
- Publication number 20020104453
- Publication date Aug 8, 2002
- Martin Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Support assembly for an exposure apparatus
- Publication number 20020102481
- Publication date Aug 1, 2002
- Martin E. Lee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus and method utilizing isolated reaction frame
- Publication number 20020017889
- Publication date Feb 14, 2002
- NIKON CORPORATION
- Martin E. Lee
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Application
Guideless stage with isolated reaction stage
- Publication number 20010030522
- Publication date Oct 18, 2001
- NIKON CORPORATION
- Martin E. Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Exposure apparatus and method utilizing isolated reaction frame
- Publication number 20010019250
- Publication date Sep 6, 2001
- NIKON CORPORATION
- Martin E. Lee
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC

Martin E. Lee

Person

Patents Grantslast 30 patents

Projection optical device and exposure apparatus

Positioning device having dynamically isolated frame, and lithograp...

Moving mechanism with high bandwidth response and low force transmi...

Image adjustor including damping assembly

Positioning device having dynamically isolated frame, and lithograp...

Positioning device having dynamically isolated frame, and lithograp...

System and method for holding a device with minimal deformation

Holder mover for a stage assembly

Platform positioning system

Inspection tool for testing and adjusting a projection unit of a li...

Guideless stage with isolated reaction stage

Method of making exposure apparatus with dynamically isolated react...

Exposure apparatus and method utilizing isolated reaction frame

Support assembly for an exposure apparatus

Active vibration isolation system having pressure control

Flexural joint

Precision stage

Vertical direction force transducer

Exposure apparatus and method utilizing isolated reaction frame

Two Axis stage with arcuate surface bearings

Method for making apparatus with dynamic support structure isolatio...

Exposure apparatus having reaction frame

Method of making exposure apparatus with dynamically isolated react...

Exposure method, and method of making exposure apparatus having dyn...

Exposure apparatus having dynamically isolated reaction frame

Exposure apparatus having dynamically isolated reaction frame

Exposure apparatus having dynamically isolated support structure

X-Y stage with arcuate surface bearings

X-Y stage with movable magnet plate

Exposure method, and method of making exposure apparatus having dyn...

Patents Applicationslast 30 patents

Projection optical device and exposure apparatus

Positioning device having dynamically isolated frame, and lithograp...

Projection Optical Device And Exposure Apparatus

Anti-Gravity Device for Supporting Weight and Reducing Transmissibi...

Low spring constant, pneumatic suspension with vacuum chamber, air...

Moving mechanism with high bandwidth response and low force transmi...

Real-time through lens image measurement system and method

Positioning device having dynamically isolated frame, and lithograp...

WINDOW FRAME-GUIDED STAGE MECHANISM

Image adjustor including damping assembly

Holder mover for a stage assembly

System and method for holding a device with minimal deformation

Sheet coils and linear motors comprising same, and stage units and...

Method and apparatus for increasing flow capacity associated with a...

Multiple point support assembly for a stage

Platform positioning system

Wafer stage assembly

Air bearing assembly

Support assembly for an exposure apparatus

Exposure apparatus and method utilizing isolated reaction frame

Guideless stage with isolated reaction stage

Exposure apparatus and method utilizing isolated reaction frame