Martin Ebert

Person

Fremont, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Scanning focal length metrology
- Patent number 8,259,296
- Issue date Sep 4, 2012
- Nanometrics Incorporated
- Richard A. Yarussi
- G01 - MEASURING TESTING
Information Patent Grant
Scanning focal length metrology
- Patent number 7,697,135
- Issue date Apr 13, 2010
- Nanometrics Incorporated
- Richard A. Yarussi
- G01 - MEASURING TESTING
Information Patent Grant
Method for noise improvement in ellipsometers
- Patent number 7,342,661
- Issue date Mar 11, 2008
- Therma-Wave, Inc.
- Martin Ebert
- G01 - MEASURING TESTING
Information Patent Grant
Multiple beam ellipsometer
- Patent number 7,321,427
- Issue date Jan 22, 2008
- Tokyo Electron Limited
- Martin Ebert
- G01 - MEASURING TESTING
Information Patent Grant
Multiple beam ellipsometer
- Patent number 7,136,164
- Issue date Nov 14, 2006
- Tokyo Electron Limited
- Martin Ebert
- G01 - MEASURING TESTING
Information Patent Grant
Fast wafer positioning method for optical metrology
- Patent number 7,030,984
- Issue date Apr 18, 2006
- Therma-Wave, Inc.
- Martin Ebert
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Multiple beam ellipsometer
- Patent number 6,985,228
- Issue date Jan 10, 2006
- Tokyo Electron Limited
- Martin Ebert
- G01 - MEASURING TESTING
Information Patent Grant
Wafer chuck with integrated reference sample
- Patent number 6,952,258
- Issue date Oct 4, 2005
- Therma-Wave, Inc.
- Martin Ebert
- G01 - MEASURING TESTING
Information Patent Grant
System for performing ellipsometry using an auxiliary pump beam to...
- Patent number 6,952,261
- Issue date Oct 4, 2005
- Therma-Wave, Inc.
- Martin Ebert
- G01 - MEASURING TESTING
Information Patent Grant
Multiple beam ellipsometer
- Patent number 6,798,512
- Issue date Sep 28, 2004
- Therma-Wave, Inc.
- Martin Ebert
- G01 - MEASURING TESTING
Information Patent Grant
Wafer chuck with integrated reference sample
- Patent number 6,757,059
- Issue date Jun 29, 2004
- Therma-Wave, Inc.
- Martin Ebert
- G01 - MEASURING TESTING
Information Patent Grant
System and method for finding the center of rotation of an R-theta...
- Patent number 6,747,746
- Issue date Jun 8, 2004
- Therma-Wave, Inc.
- Ilya Chizhov
- G01 - MEASURING TESTING
Information Patent Grant
Autofocus system
- Patent number 6,624,403
- Issue date Sep 23, 2003
- Therma-Wave, Inc.
- Li Chen
- G02 - OPTICS
Information Patent Grant
Method of reducing noise generated by arc lamps in optical systems...
- Patent number 6,411,381
- Issue date Jun 25, 2002
- North Carolina State University
- David E. Aspnes
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
MULTI-BEAM CHARGED PARTICLE COLUMN
- Publication number 20230207255
- Publication date Jun 29, 2023
- ASML NETHERLANDS B.V.
- Vincent Claude BEUGIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Multiple beam ellipsometer
- Publication number 20070030485
- Publication date Feb 8, 2007
- TOKYO ELECTRON LIMITED
- Martin Ebert
- G01 - MEASURING TESTING
Information Patent Application
Method for noise improvement in ellipsometers
- Publication number 20060132773
- Publication date Jun 22, 2006
- Martin Ebert
- G01 - MEASURING TESTING
Information Patent Application
Multiple beam ellipsometer
- Publication number 20060033914
- Publication date Feb 16, 2006
- Martin Ebert
- G01 - MEASURING TESTING
Information Patent Application
Multiple beam ellipsometer
- Publication number 20050002033
- Publication date Jan 6, 2005
- Martin Ebert
- G01 - MEASURING TESTING
Information Patent Application
Wafer chuck with integrated reference sample
- Publication number 20040207838
- Publication date Oct 21, 2004
- Martin Ebert
- G01 - MEASURING TESTING
Information Patent Application
System for performing ellipsometry using an auxiliary pump beam to...
- Publication number 20040189993
- Publication date Sep 30, 2004
- Martin Ebert
- G01 - MEASURING TESTING
Information Patent Application
Fast wafer positioning method for optical metrology
- Publication number 20040027572
- Publication date Feb 12, 2004
- Martin Ebert
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
System for providing communication between a GUI and metrology cont...
- Publication number 20030093164
- Publication date May 15, 2003
- Martin Ebert
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Optical metrology tool with dual camera path for simultaneous high...
- Publication number 20030086083
- Publication date May 8, 2003
- Martin Ebert
- G01 - MEASURING TESTING
Information Patent Application
Graphical user interface for sample positioning
- Publication number 20030081216
- Publication date May 1, 2003
- Martin Ebert
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Autofocus system
- Publication number 20030071190
- Publication date Apr 17, 2003
- Li Chen
- G02 - OPTICS
Information Patent Application
Multiple beam ellipsometer
- Publication number 20030030806
- Publication date Feb 13, 2003
- Martin Ebert
- G01 - MEASURING TESTING
Information Patent Application
System and method for finding the center of rotation of an R-theta...
- Publication number 20030025919
- Publication date Feb 6, 2003
- Ilya Chizhov
- G01 - MEASURING TESTING
Information Patent Application
Wafer chuck with integrated reference sample
- Publication number 20020159054
- Publication date Oct 31, 2002
- Martin Ebert
- G01 - MEASURING TESTING

Martin Ebert

Person

Patents Grantslast 30 patents

Scanning focal length metrology

Scanning focal length metrology

Method for noise improvement in ellipsometers

Multiple beam ellipsometer

Multiple beam ellipsometer

Fast wafer positioning method for optical metrology

Multiple beam ellipsometer

Wafer chuck with integrated reference sample

System for performing ellipsometry using an auxiliary pump beam to...

Multiple beam ellipsometer

Wafer chuck with integrated reference sample

System and method for finding the center of rotation of an R-theta...

Autofocus system

Method of reducing noise generated by arc lamps in optical systems...

Patents Applicationslast 30 patents

MULTI-BEAM CHARGED PARTICLE COLUMN

Multiple beam ellipsometer

Method for noise improvement in ellipsometers

Multiple beam ellipsometer

Multiple beam ellipsometer

Wafer chuck with integrated reference sample

System for performing ellipsometry using an auxiliary pump beam to...

Fast wafer positioning method for optical metrology

System for providing communication between a GUI and metrology cont...

Optical metrology tool with dual camera path for simultaneous high...

Graphical user interface for sample positioning

Autofocus system

Multiple beam ellipsometer

System and method for finding the center of rotation of an R-theta...

Wafer chuck with integrated reference sample