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Martin Eickelkamp
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Wurselen, DE
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last 30 patents
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Patent Grant
MOCVD layer growth method with subsequent multi-stage cleaning step
Patent number
9,670,580
Issue date
Jun 6, 2017
Aixtron SE
Martin Eickelkamp
B08 - CLEANING
Patents Applications
last 30 patents
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Patent Application
METHOD FOR ASCERTAINING THE END OF A CLEANING PROCESS FOR A PROCESS...
Publication number
20230160062
Publication date
May 25, 2023
AIXTRON SE
Utz Herwig HAHN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
GAS INLET DEVICE FOR A CVD REACTOR
Publication number
20230002902
Publication date
Jan 5, 2023
AIXTRON SE
Martin EICKELKAMP
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
TRANSPORT RING
Publication number
20190390336
Publication date
Dec 26, 2019
AIXTRON SE
Wilhelm Josef Thomas KRÜCKEN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
MOCVD LAYER GROWTH METHOD WITH SUBSEQUENT MULTI-STAGE CLEANING STEP
Publication number
20160076145
Publication date
Mar 17, 2016
AIXTRON SE
Martin EICKELKAMP
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...