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Martin Fluegge
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Wiesbaden, DE
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last 30 patents
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Patent Grant
Stabilized etching solutions for CU and CU/NI layers
Patent number
8,652,972
Issue date
Feb 18, 2014
BASF Aktiengesellschaft
Martin Fluegge
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
STABILIZED ETCHING SOLUTIONS FOR CU AND CU/NI LAYERS
Publication number
20100304573
Publication date
Dec 2, 2010
BASF SE
Martin Fluegge
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...