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Martin Frans Pierre Smeets
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Veldhoven, NL
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Patents Grants
last 30 patents
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Patent Grant
Lithographic apparatus and device manufacturing method having liqui...
Patent number
7,804,575
Issue date
Sep 28, 2010
ASML Netherlands B.V.
Theodorus Petrus Maria Cadee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,304,715
Issue date
Dec 4, 2007
ASML Netherlands B.V.
Theodorus Petrus Maria Cadee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20120113402
Publication date
May 10, 2012
ASML NETHERLANDS B.V.
Theodorus Petrus Maria CADEE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method for Calibrating a Target Surface of a Position Measurement S...
Publication number
20120078561
Publication date
Mar 29, 2012
ASML NETHERLANDS B.V.
Paulus Johannes KNIJN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
LITHOGRAPHIC APPARATUS COMPRISING A MAGNET, METHOD FOR THE PROTECTI...
Publication number
20110013157
Publication date
Jan 20, 2011
ASML NETHERLANDS B.V.
Johannes Hubertus Josephina Moors
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20100321650
Publication date
Dec 23, 2010
ASML NETHERLANDS B.V.
THEODORUS PETRUS MARIA CADEE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
Clamping Device And Object Loading Method
Publication number
20100195080
Publication date
Aug 5, 2010
ASML Netherlands B.V.
Rene Theodorus Compen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic Apparatus and Device Manufacturing Method
Publication number
20090086187
Publication date
Apr 2, 2009
ASML Netherlands
Rene Theodorus Petrus COMPEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY