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Martin Freitag
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Dresden, DE
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last 30 patents
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Patent Grant
Methods including a processing of wafers and spin coating tool
Patent number
9,653,367
Issue date
May 16, 2017
GLOBALFOUNDRIES Inc.
Torsten Maehr
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
METHODS INCLUDING A PROCESSING OF WAFERS AND SPIN COATING TOOL
Publication number
20160379900
Publication date
Dec 29, 2016
GLOBALFOUNDRIES INC.
Torsten Maehr
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...