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Martin Friedrichs
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Dresden, DE
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Patents Grants
last 30 patents
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Patent Grant
MMS, MMS array, MEMS actuator and method for providing an MMS
Patent number
11,459,229
Issue date
Oct 4, 2022
Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
Peter Duerr
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microelectromechanical component and method for producing same
Patent number
11,148,940
Issue date
Oct 19, 2021
Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
Dirk Rudloff
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Electromechanical component, electromechanical component arrangemen...
Patent number
11,079,411
Issue date
Aug 3, 2021
Fraunhofer-Gesellschaft zur Forderung der Angewandten Forschung E.V.
Linus Elsäber
G01 - MEASURING TESTING
Information
Patent Grant
MEMS actuator, system having a plurality of MEMS actuators, and met...
Patent number
10,807,859
Issue date
Oct 20, 2020
Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
Peter Duerr
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of producing a device with a movable portion
Patent number
7,396,740
Issue date
Jul 8, 2008
Frauhofer-Gesellschaft zur Foerderung der Angewandten Forschung E.V.
Thor Bakke
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
MICROELECTROMECHANICAL COMPONENT AND METHOD FOR PRODUCING SAME
Publication number
20200239303
Publication date
Jul 30, 2020
Fraunhofer-Gesellschaft zur foerderung der Angewandten Forschung e.V.
Dirk RUDLOFF
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MMS, MMS ARRAY, MEMS ACTUATOR AND METHOD FOR PROVIDING AN MMS
Publication number
20190345023
Publication date
Nov 14, 2019
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG e.V.
Peter DUERR
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Electromechanical component, electromechanical component arrangemen...
Publication number
20190086446
Publication date
Mar 21, 2019
Fraunhofer-Gesellschaft aur Fõrderung der angewandten Forschung e.V.
Linus ELSÄßER
G01 - MEASURING TESTING
Information
Patent Application
MEMS ACTUATOR, SYSTEM HAVING A PLURALITY OF MEMS ACTUATORS, AND MET...
Publication number
20170297897
Publication date
Oct 19, 2017
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG e.V.
Peter DUERR
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method of producing a device with a movable portion
Publication number
20060166463
Publication date
Jul 27, 2006
Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung, e.V.
Thor Bakke
B81 - MICRO-STRUCTURAL TECHNOLOGY