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Martin Gutsche
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Poughkeepsie, NY, US
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last 30 patents
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Patent Grant
Dual damascene structure
Patent number
6,033,977
Issue date
Mar 7, 2000
Siemens Aktiengesellschaft
Martin Gutsche
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Removal of post-RIE polymer on Al/Cu metal line
Patent number
5,980,770
Issue date
Nov 9, 1999
Siemens Aktiengesellschaft
Ravikumar Ramachandran
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Deposition of carbon into nitride layer for improved selectivity of...
Patent number
5,935,873
Issue date
Aug 10, 1999
Siemens Aktiengesellschaft
Bruno Spuler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for forming metallization in semiconductor devices with a se...
Patent number
5,854,126
Issue date
Dec 29, 1998
Siemens Aktiengesellschaft
Dirk Tobben
H01 - BASIC ELECTRIC ELEMENTS