Martin J. McGrath

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Sunnyvale, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Scrubber control system
- Patent number 5,975,736
- Issue date Nov 2, 1999
- Ontrak Systems, Inc.
- Mark A. Simmons
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method and apparatus for detecting a substrate in a substrate proce...
- Patent number 5,606,251
- Issue date Feb 25, 1997
- Ontrak Systems, Inc.
- Lynn S. Ryle
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scrubber control system
- Patent number 5,548,505
- Issue date Aug 20, 1996
- OkTrak Systems, Inc.
- Mark A. Simmons
- G05 - CONTROLLING REGULATING
Information Patent Grant
System and method for automated positioning of a substrate in a pro...
- Patent number 5,483,138
- Issue date Jan 9, 1996
- Applied Materials, Inc.
- Simon Shmookler
- G05 - CONTROLLING REGULATING