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Martin Jacobus Johan JAK
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's-Hertogenbosch, NL
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Patents Grants
last 30 patents
Information
Patent Grant
Metrology apparatus and method for determining a characteristic of...
Patent number
11,650,047
Issue date
May 16, 2023
ASML Netherlands B.V.
Patricius Aloysius Jacobus Tinnemans
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Eye-safe laser-based lighting
Patent number
11,549,651
Issue date
Jan 10, 2023
SIGNIFY HOLDING B.V.
Marcellinus Petrus Carolus Michael Krijn
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Metrology method, target and substrate
Patent number
11,428,521
Issue date
Aug 30, 2022
ASML Netherlands B.V.
Kaustuve Bhattacharyya
G01 - MEASURING TESTING
Information
Patent Grant
Method of measuring a structure, inspection apparatus, lithographic...
Patent number
11,385,552
Issue date
Jul 12, 2022
ASML Netherlands B.V.
Martin Jacobus Johan Jak
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method to determine a patterning process parameter
Patent number
11,300,883
Issue date
Apr 12, 2022
ASML Netherlands B.V.
Martin Jacobus Johan Jak
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Metrology method, target and substrate
Patent number
11,204,239
Issue date
Dec 21, 2021
ASML Netherlands B.V.
Kaustuve Bhattacharyya
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Metrology recipe selection
Patent number
11,106,142
Issue date
Aug 31, 2021
ASML Netherlands B.V.
Kaustuve Bhattacharyya
G01 - MEASURING TESTING
Information
Patent Grant
Metrology apparatus and method for determining a characteristic of...
Patent number
11,009,343
Issue date
May 18, 2021
ASML Netherlands B.V.
Patricius Aloysius Jacobus Tinnemans
G01 - MEASURING TESTING
Information
Patent Grant
Method of measuring a structure, inspection apparatus, lithographic...
Patent number
10,831,109
Issue date
Nov 10, 2020
ASML Netherlands B.V.
Martin Jacobus Johan Jak
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Metrology method, target and substrate
Patent number
10,718,604
Issue date
Jul 21, 2020
ASML Netherlands B.V.
Kaustuve Bhattacharyya
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Metrology in lithographic processes
Patent number
10,656,533
Issue date
May 19, 2020
ASML Netherlands B.V.
Simon Gijsbert Josephus Mathijssen
G01 - MEASURING TESTING
Information
Patent Grant
Method of measuring, device manufacturing method, metrology apparat...
Patent number
10,656,534
Issue date
May 19, 2020
ASML Netherlands B.V.
Nitesh Pandey
G01 - MEASURING TESTING
Information
Patent Grant
Correction using stack difference
Patent number
10,635,004
Issue date
Apr 28, 2020
ASML Netherlands B.V.
Aiqin Jiang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Determining edge roughness parameters
Patent number
10,634,490
Issue date
Apr 28, 2020
ASML Netherlands B.V.
Martin Jacobus Johan Jak
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Metrology method and apparatus
Patent number
10,620,550
Issue date
Apr 14, 2020
ASML Netherlands B.V.
Martin Jacobus Johan Jak
G01 - MEASURING TESTING
Information
Patent Grant
Focus control arrangement and method
Patent number
10,551,308
Issue date
Feb 4, 2020
ASML Netherlands B.V.
Martin Jacobus Johan Jak
G01 - MEASURING TESTING
Information
Patent Grant
Metrology recipe selection
Patent number
10,527,953
Issue date
Jan 7, 2020
ASML Netherlands B.V.
Kaustuve Bhattacharyya
G01 - MEASURING TESTING
Information
Patent Grant
Method of measuring a structure, inspection apparatus, lithographic...
Patent number
10,481,506
Issue date
Nov 19, 2019
ASML Netherlands B.V.
Murat Bozkurt
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Metrology method, target and substrate
Patent number
10,386,176
Issue date
Aug 20, 2019
ASML Netherlands B.V.
Kaustuve Bhattacharyya
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Metrology method, target and substrate
Patent number
10,379,445
Issue date
Aug 13, 2019
ASML Netherlands B.V.
Martin Jacobus Johan Jak
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Illumination system, inspection apparatus including such an illumin...
Patent number
10,338,401
Issue date
Jul 2, 2019
ASML Netherlands B.V.
Gerbrand Van Der Zouw
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of measuring, device manufacturing method, metrology apparat...
Patent number
10,310,389
Issue date
Jun 4, 2019
ASML Netherlands B.V.
Nitesh Pandey
G01 - MEASURING TESTING
Information
Patent Grant
Methods and apparatus for predicting performance of a measurement m...
Patent number
10,289,008
Issue date
May 14, 2019
ASML Netherlands B.V.
Martin Jacobus Johan Jak
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Metrology method and apparatus, substrates for use in such methods,...
Patent number
10,162,272
Issue date
Dec 25, 2018
ASML Netherlands B.V.
Martin Jacobus Johan Jak
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Metrology method, target and substrate
Patent number
10,133,188
Issue date
Nov 20, 2018
ASML Netherlands B.V.
Martin Jacobus Johan Jak
G02 - OPTICS
Information
Patent Grant
Method, apparatus and substrates for lithographic metrology
Patent number
10,042,268
Issue date
Aug 7, 2018
ASML Netherlands B.V.
Hendrik Jan Hidde Smilde
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of measuring a property of a target structure, inspection ap...
Patent number
9,940,703
Issue date
Apr 10, 2018
ASML Netherlands B.V.
Murat Bozkurt
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Metrology method and apparatus, substrate, lithographic system and...
Patent number
9,811,003
Issue date
Nov 7, 2017
ASML Netherlands B.V.
Martin Jacobus Johan Jak
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Illumination system, inspection apparatus including such an illumin...
Patent number
9,753,296
Issue date
Sep 5, 2017
ASML Netherlands B.V.
Gerbrand Van Der Zouw
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Spectral purity filter
Patent number
9,726,989
Issue date
Aug 8, 2017
ASML Netherlands B.V.
Wouter Anthon Soer
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
METROLOGY METHOD, TARGET AND SUBSTRATE
Publication number
20230016664
Publication date
Jan 19, 2023
ASML NETHERLANDS B.V.
Kaustuve BHATTACHARYYA
G01 - MEASURING TESTING
Information
Patent Application
METROLOGY METHOD, TARGET AND SUBSTRATE
Publication number
20220057192
Publication date
Feb 24, 2022
ASML NETHERLANDS B.V.
Kaustuve BHATTACHARYYA
G01 - MEASURING TESTING
Information
Patent Application
METROLOGY APPARATUS AND METHOD FOR DETERMINING A CHARACTERISTIC OF...
Publication number
20210325174
Publication date
Oct 21, 2021
ASML NETHERLANDS B.V.
Patricius Aloysius Jacobus TINNEMANS
G01 - MEASURING TESTING
Information
Patent Application
Method of Measuring a Structure, Inspection Apparatus, Lithographic...
Publication number
20210026256
Publication date
Jan 28, 2021
ASML NETHERLANDS B.V.
Martin Jacobus Johan JAK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METROLOGY METHOD, TARGET AND SUBSTRATE
Publication number
20200348125
Publication date
Nov 5, 2020
ASML NETHERLANDS B.V.
Kaustuve BHATTACHARYYA
G01 - MEASURING TESTING
Information
Patent Application
METROLOGY RECIPE SELECTION
Publication number
20200218166
Publication date
Jul 9, 2020
ASML NETHERLANDS B.V.
Kaustuve BHATTACHARYYA
G01 - MEASURING TESTING
Information
Patent Application
Method of Measuring a Structure, Inspection Apparatus, Lithographic...
Publication number
20200050114
Publication date
Feb 13, 2020
ASML NETHERLANDS B.V.
Murat Bozkurt
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METROLOGY METHOD, TARGET AND SUBSTRATE
Publication number
20190346256
Publication date
Nov 14, 2019
ASML NETHERLANDS B.V.
Kaustuve BHATTACHARYYA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD OF MEASURING, DEVICE MANUFACTURING METHOD, METROLOGY APPARAT...
Publication number
20190285993
Publication date
Sep 19, 2019
ASML NETHERLANDS B.V.
Nitesh PANDEY
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Metrology Apparatus and Method for Determining a Characteristic of...
Publication number
20190265028
Publication date
Aug 29, 2019
Stichting VU
Patricius Aloysius Jacobus TINNEMANS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EYE-SAFE LASER-BASED LIGHTING
Publication number
20190165543
Publication date
May 30, 2019
SIGNIFY HOLDING B.V.
MARCELLINUS PETRUS CAROLUS MICHAEL KRIJN
F21 - LIGHTING
Information
Patent Application
Method to Determine a Patterning Process Parameter
Publication number
20190094703
Publication date
Mar 28, 2019
ASML NETHERLANDS B.V.
Martin Jacobus Johan JAK
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Metrology in Lithographic Processes
Publication number
20190079413
Publication date
Mar 14, 2019
ASML NETHERLANDS B.V.
Simon Gijsbert Josephus MATHIJSSEN
G01 - MEASURING TESTING
Information
Patent Application
METROLOGY METHOD AND APPARATUS
Publication number
20190072859
Publication date
Mar 7, 2019
ASML NETHERLANDS B.V.
Martin Jacobus Johan JAK
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METROLOGY METHOD, TARGET AND SUBSTRATE
Publication number
20190064677
Publication date
Feb 28, 2019
ASML NETHERLANDS B.V.
Martin Jacobus Johan Jak
G02 - OPTICS
Information
Patent Application
Determining Edge Roughness Parameters
Publication number
20180364036
Publication date
Dec 20, 2018
ASML NETHERLANDS B.V.
Martin Jacobus Johan JAK
G01 - MEASURING TESTING
Information
Patent Application
Method of Measuring a Structure, Inspection Apparatus, Lithographic...
Publication number
20180321599
Publication date
Nov 8, 2018
ASML NETHERLANDS B.V.
Murat BOZKURT
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Methods and Apparatus for Predicting Performance of a Measurement M...
Publication number
20180203367
Publication date
Jul 19, 2018
ASML NETHERLANDS B.V.
Martin Jacobus Johan JAK
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method of Measuring a Structure, Inspection Apparatus, Lithographic...
Publication number
20180173112
Publication date
Jun 21, 2018
ASML NETHERLANDS B.V.
Martin Jacobus Johan JAK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Illumination System, Inspection Apparatus Including Such an Illumin...
Publication number
20180088347
Publication date
Mar 29, 2018
ASML NETHERLANDS B.V.
Gerbrand VAN DER ZOUW
G02 - OPTICS
Information
Patent Application
METROLOGY RECIPE SELECTION
Publication number
20180088470
Publication date
Mar 29, 2018
ASML NETHERLANDS B.V.
Kaustuve BHATTACHARYYA
G01 - MEASURING TESTING
Information
Patent Application
Method of Measuring a Property of a Target Structure, Inspection Ap...
Publication number
20170206649
Publication date
Jul 20, 2017
ASML NETHERLANDS B.V.
Murat BOZKURT
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METROLOGY METHOD, TARGET AND SUBSTRATE
Publication number
20170184977
Publication date
Jun 29, 2017
ASML NETHERLANDS B.V.
Martin Jacobus Johan JAK
G01 - MEASURING TESTING
Information
Patent Application
FOCUS CONTROL ARRANGEMENT AND METHOD
Publication number
20170176328
Publication date
Jun 22, 2017
ASML NETHERLANDS B.V.
Martin Jacobus Johan JAK
G01 - MEASURING TESTING
Information
Patent Application
Metrology Method and Apparatus, Substrate, Lithographic System and...
Publication number
20170068173
Publication date
Mar 9, 2017
ASML NETHERLANDS B.V.
Martin Jacobus Johan JAK
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METROLOGY METHOD AND APPARATUS, SUBSTRATES FOR USE IN SUCH METHODS,...
Publication number
20170052454
Publication date
Feb 23, 2017
ASML NETHERLANDS B.V.
Martin Jacobus Johan JAK
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method, Apparatus and Substrates for Lithographic Metrology
Publication number
20160291481
Publication date
Oct 6, 2016
ASML NETHERLANDS B.V.
Hendrik Jan Hidde SMILDE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method of Measuring a Property of a Target Structure, Inspection Ap...
Publication number
20160086324
Publication date
Mar 24, 2016
ASML NETHERLANDS B.V.
Murat BOZKURT
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METROLOGY METHOD, TARGET AND SUBSTRATE
Publication number
20160061589
Publication date
Mar 3, 2016
ASML NETHERLANDS B.V.
Kaustuve BHATTACHARYYA
G01 - MEASURING TESTING
Information
Patent Application
Illumination System, Inspection Apparatus Including Such an Illumin...
Publication number
20160025992
Publication date
Jan 28, 2016
ASML NETHERLANDS B.V.
Gerbrand VAN DER ZOUW
G02 - OPTICS