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Martin Jules Marie-Emile DE NIVELLE
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Waalre, NL
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last 30 patents
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Patent Grant
Substrate level sensing in a lithographic apparatus
Patent number
12,339,594
Issue date
Jun 24, 2025
ASML Netherlands B.V.
Martin Jules Marie-Emile De Nivelle
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
Apparatus and method for measuring substrate height
Patent number
11,662,669
Issue date
May 30, 2023
ASML Netherlands B.V.
Andrey Valerievich Rogachevskiy
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
Level sensor apparatus, method of measuring topographical variation...
Patent number
11,029,614
Issue date
Jun 8, 2021
ASML Netherlands B.V.
Wim Tjibbo Tel
G05 - CONTROLLING REGULATING
Patents Applications
last 30 patents
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Patent Application
SUBSTRATE LEVEL SENSING IN A LITHOGRAPHIC APPARATUS
Publication number
20230384698
Publication date
Nov 30, 2023
ASML NETHERLANDS B.V.
Martin Jules Marie-Emile DE NIVELLE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
APPARATUS AND METHOD FOR MEASURING SUBSTRATE HEIGHT
Publication number
20220244651
Publication date
Aug 4, 2022
ASML NETHERLANDS B.V.
Andrey Valerievich ROGACHEVSKIY
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LEVEL SENSOR APPARATUS, METHOD OF MEASURING TOPOGRAPHICAL VARIATION...
Publication number
20190243259
Publication date
Aug 8, 2019
ASML NETHERLANDS B.V.
Wim Tjibbo TEL
G05 - CONTROLLING REGULATING