Martin Köffler

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Weissenstein, AT

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Patents Grantslast 30 patents

Information Patent Grant
Device and method for wet treating disc-like substrates
- Patent number 8,435,356
- Issue date May 7, 2013
- Lam Research AG
- Rainer Obweger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device and method for wet treating disc-like substrates
- Patent number 8,261,757
- Issue date Sep 11, 2012
- Lam Research AG
- Rainer Obweger
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
DEVICE AND METHOD FOR WET TREATING DISC-LIKE SUBSTRATES
- Publication number 20120167914
- Publication date Jul 5, 2012
- LAM RESEARCH AG
- Rainer OBWEGER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Device and method for wet treating disc-like substrates
- Publication number 20060151014
- Publication date Jul 13, 2006
- SEZ AG
- Rainer Obweger
- H01 - BASIC ELECTRIC ELEMENTS