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Martin Kienle
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Ellwangen, DE
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last 30 patents
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Patent Grant
Particle beam device
Patent number
7,109,487
Issue date
Sep 19, 2006
Carl Zeiss NTS GmbH
Martin Kienle
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
METHOD FOR CONTROLLING A UNIT OF A PARTICLE BEAM DEVICE AND PARTICL...
Publication number
20200333271
Publication date
Oct 22, 2020
CARL ZEISS MICROSCOPY GMBH
Christian Hendrich
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
Particle beam device
Publication number
20050116165
Publication date
Jun 2, 2005
Martin Kienle
G01 - MEASURING TESTING