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Martin Knapp
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Laufen, DE
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last 30 patents
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Patent Grant
Method for depositing thin films by mixed pulsed CVD and ALD
Patent number
8,017,182
Issue date
Sep 13, 2011
ASM International N.V.
Menso Hendriks
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Titanium silicon nitride deposition
Patent number
7,833,906
Issue date
Nov 16, 2010
ASM International N.V.
Martin A. Knapp
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
TITANIUM SILICON NITRIDE DEPOSITION
Publication number
20100151681
Publication date
Jun 17, 2010
ASM INTERNATIONAL N.V.
Martin A. Knapp
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD FOR DEPOSITING THIN FILMS BY MIXED PULSED CVD AND ALD
Publication number
20080317972
Publication date
Dec 25, 2008
ASM International NV
Menso Hendriks
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Use of dissolved hafnium alkoxides or zirconium alkoxides as precur...
Publication number
20070031599
Publication date
Feb 8, 2007
Alexander Gschwandtner
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...