Martin L. Hammond

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Cupertino, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Inductive plasma reactor
- Patent number 6,551,447
- Issue date Apr 22, 2003
- Mattson Technology, Inc.
- Stephen E. Savas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleaning process for rapid thermal processing system
- Patent number 6,236,023
- Issue date May 22, 2001
- Mattson Technology, Inc.
- Stephen E. Savas
- C30 - CRYSTAL GROWTH
Information Patent Grant
Model based method for wafer temperature control in a thermal proce...
- Patent number 6,169,271
- Issue date Jan 2, 2001
- Mattson Technology, Inc.
- Stephen E. Savas
- C30 - CRYSTAL GROWTH
Information Patent Grant
Inductive plasma reactor
- Patent number 6,143,129
- Issue date Nov 7, 2000
- Mattson Technology, Inc.
- Stephen E. Savas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reactor apparatus for semiconductor wafer processing
- Patent number 4,694,779
- Issue date Sep 22, 1987
- Tetron, Inc.
- Martin L. Hammond
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...