Martin Lambert

Person

Korb, DE

People

Patents Grantslast 30 patents

Information Patent Grant
EUV light source with a beam positioning device
- Patent number 12,171,054
- Issue date Dec 17, 2024
- TRUMPF Lasersystems for Semiconductor Manufacturing SE
- Martin Lambert
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser focussing module
- Patent number 12,007,693
- Issue date Jun 11, 2024
- ASML Netherlands B.V.
- Ruud Antonius Catharina Maria Beerens
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Focusing device and EUV radiation generating device having same
- Patent number 11,835,699
- Issue date Dec 5, 2023
- TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- Martin Lambert
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Reflective optical element, beam guiding device and EUV-beam genera...
- Patent number 11,675,202
- Issue date Jun 13, 2023
- TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- Martin Lambert
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Adjusting a beam diameter and an aperture angle of a laser beam
- Patent number 10,327,318
- Issue date Jun 18, 2019
- TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- Martin Lambert
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Beam trap, beam guide device, EUV radiation generating apparatus, a...
- Patent number 10,264,660
- Issue date Apr 16, 2019
- TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- Martin Lambert
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
EUV radiation generating device including a beam influencing optica...
- Patent number 9,642,235
- Issue date May 2, 2017
- TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- Joachim Schulz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Beam guiding apparatus
- Patent number 9,575,324
- Issue date Feb 21, 2017
- TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- Martin Lambert
- G02 - OPTICS
Information Patent Grant
Optical arrangement, optical module, and method for correctly posit...
- Patent number 9,323,026
- Issue date Apr 26, 2016
- TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- Martin Lambert
- G02 - OPTICS
Information Patent Grant
EUV excitation light source with a laser beam source and a beam gui...
- Patent number 9,129,717
- Issue date Sep 8, 2015
- TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- Martin Lambert
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Beam guide and method for adjusting the opening angle of a laser beam
- Patent number 9,016,881
- Issue date Apr 28, 2015
- Trumpf Laser- und Systemtechnik GmbH
- Martin Lambert
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
EUV radiation generating apparatus and operating methods
- Patent number 8,847,182
- Issue date Sep 30, 2014
- Trumpf Laser- und Systemtechnik GmbH
- Martin Lambert
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser machine monitoring
- Patent number 8,445,815
- Issue date May 21, 2013
- TRUMPF Werkzeugmaschinen GmbH+Co. KG
- Martin Lambert
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Encoded optical element of a laser processing head
- Patent number 7,947,923
- Issue date May 24, 2011
- TRUMPF Werkzeugmaschinen GmbH+Co. KG
- Martin Lambert
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser machine monitoring
- Patent number 7,875,830
- Issue date Jan 25, 2011
- TRUMPF Werkzeugmaschinen GmbH+Co. KG
- Martin Lambert
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Interface for a laser processing head
- Patent number 7,816,621
- Issue date Oct 19, 2010
- TRUMPF Werkzeugmaschinen GmbH+Co. KG
- Jürgen-Michael Weick
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Flushing lines or cavities of a laser processing machine
- Patent number 7,741,579
- Issue date Jun 22, 2010
- TRUMPF Werkzeugmaschinen GmbH+Co. KG
- Martin Lambert
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser processing head
- Patent number 7,605,342
- Issue date Oct 20, 2009
- TRUMPF Werkzeugmaschinen GmbH+Co. KG
- Martin Lambert
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser processing nozzle coupling
- Patent number 7,273,997
- Issue date Sep 25, 2007
- TRUMPF Werkzeugmaschinen GmbH+Co. KG
- Martin Lambert
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser processor with scavenging of optical element
- Patent number 6,538,232
- Issue date Mar 25, 2003
- Trumpf GmbH & Company
- Martin Lambert
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
EUV LIGHT SOURCE WITH A BEAM POSITIONING DEVICE
- Publication number 20240357726
- Publication date Oct 24, 2024
- TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- Martin Lambert
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
LASER FOCUSSING MODULE
- Publication number 20220206397
- Publication date Jun 30, 2022
- ASML NETHERLANDS B.V.
- Ruud Antonius Catharina Maria BEERENS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FOCUSING DEVICE AND EUV RADIATION GENERATING DEVICE HAVING SAME
- Publication number 20210063712
- Publication date Mar 4, 2021
- TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- Martin Lambert
- G02 - OPTICS
Information Patent Application
REFLECTIVE OPTICAL ELEMENT, BEAM GUIDING DEVICE AND EUV-BEAM GENERA...
- Publication number 20210041708
- Publication date Feb 11, 2021
- TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- Martin Lambert
- G02 - OPTICS
Information Patent Application
Beam Trap, Beam Guide Device, EUV Radiation Generating Apparatus, a...
- Publication number 20170367167
- Publication date Dec 21, 2017
- TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- Martin Lambert
- G02 - OPTICS
Information Patent Application
Adjusting a Beam Diameter and an Aperture Angle of a Laser Beam
- Publication number 20170325325
- Publication date Nov 9, 2017
- TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- Martin Lambert
- G02 - OPTICS
Information Patent Application
Device for Monitoring the Alignment of a Laser Beam, and EUV Radiat...
- Publication number 20170064801
- Publication date Mar 2, 2017
- TRUMPF Laser - und Systemtechnik GmbH
- Martin Lambert
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Beam Guiding Apparatus
- Publication number 20160195729
- Publication date Jul 7, 2016
- TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- Martin Lambert
- G02 - OPTICS
Information Patent Application
EUV Radiation Generating Device Including a Beam Influencing Optica...
- Publication number 20160135275
- Publication date May 12, 2016
- TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- Joachim Schulz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EUV-Strahlungserzeugungsvorrichtung und Betriebsverfahren Dafuer
- Publication number 20140084186
- Publication date Mar 27, 2014
- TRUMPF Laser - und Systemtechnik GmbH
- Martin Lambert
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Beam guide and method for adjusting the opening angle of a laser beam
- Publication number 20140085741
- Publication date Mar 27, 2014
- Martin Lambert
- G02 - OPTICS
Information Patent Application
Optical arrangement, optical module, and method for correctly posit...
- Publication number 20140043676
- Publication date Feb 13, 2014
- TRUMPF Laser - und Systemtechnik GmbH
- Martin Lambert
- G02 - OPTICS
Information Patent Application
EUV excitation light source with a laser beam source and a beam gui...
- Publication number 20130327963
- Publication date Dec 12, 2013
- TRUMPF Laser - und Systemtechnik GmbH
- Martin Lambert
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
LASER MACHINE MONITORING
- Publication number 20110100968
- Publication date May 5, 2011
- TRUMPF WERKZEUGMASCHINEN GMBH + CO. KG
- Martin Lambert
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Laser Processing Machine and Method
- Publication number 20090107963
- Publication date Apr 30, 2009
- TRUMPF WERKZEUGMASCHINEN GMBH + CO. KG
- Martin Lambert
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
LASER MACHINE MONITORING
- Publication number 20070291379
- Publication date Dec 20, 2007
- TRUMPF WERKZEUGMASCHINEN GMBH + CO. KG
- Martin Lambert
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Flushing lines or cavities of a laser processing machine
- Publication number 20070051709
- Publication date Mar 8, 2007
- Martin Lambert
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Interface for a laser processing head
- Publication number 20060153668
- Publication date Jul 13, 2006
- Jurgen-Michael Weick
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Encoded optical element of a laser processing head
- Publication number 20060081576
- Publication date Apr 20, 2006
- Martin Lambert
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Laser processing head
- Publication number 20060027537
- Publication date Feb 9, 2006
- Martin Lambert
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Laser processing nozzle coupling
- Publication number 20050061790
- Publication date Mar 24, 2005
- Martin Lambert
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Beam guiding chamber of a laser processing machine
- Publication number 20040211763
- Publication date Oct 28, 2004
- Martin Lambert
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Laser processor with scavenging of optical element
- Publication number 20020017514
- Publication date Feb 14, 2002
- Martin Lambert
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Martin Lambert

Person

Patents Grantslast 30 patents

EUV light source with a beam positioning device

Laser focussing module

Focusing device and EUV radiation generating device having same

Reflective optical element, beam guiding device and EUV-beam genera...

Adjusting a beam diameter and an aperture angle of a laser beam

Beam trap, beam guide device, EUV radiation generating apparatus, a...

EUV radiation generating device including a beam influencing optica...

Beam guiding apparatus

Optical arrangement, optical module, and method for correctly posit...

EUV excitation light source with a laser beam source and a beam gui...

Beam guide and method for adjusting the opening angle of a laser beam

EUV radiation generating apparatus and operating methods

Laser machine monitoring

Encoded optical element of a laser processing head

Laser machine monitoring

Interface for a laser processing head

Flushing lines or cavities of a laser processing machine

Laser processing head

Laser processing nozzle coupling

Laser processor with scavenging of optical element

Patents Applicationslast 30 patents

EUV LIGHT SOURCE WITH A BEAM POSITIONING DEVICE

LASER FOCUSSING MODULE

FOCUSING DEVICE AND EUV RADIATION GENERATING DEVICE HAVING SAME

REFLECTIVE OPTICAL ELEMENT, BEAM GUIDING DEVICE AND EUV-BEAM GENERA...

Beam Trap, Beam Guide Device, EUV Radiation Generating Apparatus, a...

Adjusting a Beam Diameter and an Aperture Angle of a Laser Beam

Device for Monitoring the Alignment of a Laser Beam, and EUV Radiat...

Beam Guiding Apparatus

EUV Radiation Generating Device Including a Beam Influencing Optica...

EUV-Strahlungserzeugungsvorrichtung und Betriebsverfahren Dafuer

Beam guide and method for adjusting the opening angle of a laser beam

Optical arrangement, optical module, and method for correctly posit...

EUV excitation light source with a laser beam source and a beam gui...

LASER MACHINE MONITORING

Laser Processing Machine and Method

LASER MACHINE MONITORING

Flushing lines or cavities of a laser processing machine

Interface for a laser processing head

Encoded optical element of a laser processing head

Laser processing head

Laser processing nozzle coupling

Beam guiding chamber of a laser processing machine

Laser processor with scavenging of optical element