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Martin M. Barrera
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Santa Clara, CA, US
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last 30 patents
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Patent Grant
Apparatus and method of effective fluid injection and vaporization...
Patent number
8,302,884
Issue date
Nov 6, 2012
Novellus Systems, Inc.
Martin M. Barrera
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Method of semiconductor wafer heating to prevent bowing
Patent number
6,561,796
Issue date
May 13, 2003
Novellus Systems, Inc.
Martin M. Barrera
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...