Martin Meier

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Heidenheim, DE

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Patents Grantslast 30 patents

Information Patent Grant
Collector
- Patent number 9,645,503
- Issue date May 9, 2017
- Carl Zeiss SMT GmbH
- Ingo Saenger
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Illumination optical unit for projection lithography
- Patent number 9,507,269
- Issue date Nov 29, 2016
- Carl Zeiss SMT GmbH
- Christoph Hennerkes
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical system of a microlithographic projection exposure apparatus...
- Patent number 9,500,956
- Issue date Nov 22, 2016
- Carl Zeiss SMT GmbH
- Ingo Saenger
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Polarization actuator
- Patent number 8,373,847
- Issue date Feb 12, 2013
- Carl Zeiss SMT GmbH
- Michael Patra
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
COLLECTOR
- Publication number 20140192339
- Publication date Jul 10, 2014
- Ingo Saenger
- B82 - NANO-TECHNOLOGY
Information Patent Application
OPTICAL SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS...
- Publication number 20140132942
- Publication date May 15, 2014
- Ingo Saenger
- G02 - OPTICS
Information Patent Application
ILLUMINATION OPTICAL UNIT FOR PROJECTION LITHOGRAPHY
- Publication number 20140111785
- Publication date Apr 24, 2014
- Christoph Hennerkes
- G02 - OPTICS
Information Patent Application
POLARIZATION ACTUATOR
- Publication number 20120099093
- Publication date Apr 26, 2012
- Carl Zeiss SMT GMBH
- Michael Patra
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY