Martin Plihal

Person

Pleasanton, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
System and method for determining defects using physics-based image...
- Patent number 11,676,264
- Issue date Jun 13, 2023
- KLA Corporation
- Martin Plihal
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Nuisance mining for novel defect discovery
- Patent number 11,514,357
- Issue date Nov 29, 2022
- KLA-Tencor Corporation
- Martin Plihal
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Methods and systems for inspection of semiconductor structures with...
- Patent number 11,379,967
- Issue date Jul 5, 2022
- KLA Corporation
- Jacob George
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for process monitoring with optical inspections
- Patent number 11,379,969
- Issue date Jul 5, 2022
- KLA Corporation
- Martin Plihal
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Diagnostic methods for the classifiers and the defects captured by...
- Patent number 11,237,119
- Issue date Feb 1, 2022
- KLA-Tencor Corporation
- Martin Plihal
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
System and method for difference filter and aperture selection usin...
- Patent number 11,151,707
- Issue date Oct 19, 2021
- KLA Corporation
- Santosh Bhattacharyya
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Defect location accuracy using shape based grouping guided defect c...
- Patent number 11,119,060
- Issue date Sep 14, 2021
- KLA-Tencor Corporation
- Jagdish Chandra Saraswatula
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Defect candidate generation for inspection
- Patent number 11,114,324
- Issue date Sep 7, 2021
- KLA Corp.
- Martin Plihal
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Semiconductor hot-spot and process-window discovery combining optic...
- Patent number 11,055,840
- Issue date Jul 6, 2021
- KLA Corporation
- Ardis Liang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
System, method for training and applying defect classifiers in wafe...
- Patent number 10,964,013
- Issue date Mar 30, 2021
- KLA-Tencor Corporation
- Martin Plihal
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Creating and tuning a classifier to capture more defects of interes...
- Patent number 10,902,579
- Issue date Jan 26, 2021
- KLA-Tencor Corporation
- Erfan Soltanmohammadi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
And noise based care areas
- Patent number 10,832,396
- Issue date Nov 10, 2020
- KLA-Tencor Corp.
- Brian Duffy
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Identifying nuisances and defects of interest in defects detected o...
- Patent number 10,699,926
- Issue date Jun 30, 2020
- KLA-Tencor Corp.
- Martin Plihal
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Care areas for improved electron beam defect detection
- Patent number 10,692,690
- Issue date Jun 23, 2020
- KLA-Tencor Corporation
- Vidyasagar Anantha
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mode selection for inspection
- Patent number 10,670,536
- Issue date Jun 2, 2020
- KLA-Tencor Corp.
- Martin Plihal
- G01 - MEASURING TESTING
Information Patent Grant
Adaptive automatic defect classification
- Patent number 10,436,720
- Issue date Oct 8, 2019
- KLA-Tenfor Corp.
- Li He
- G01 - MEASURING TESTING
Information Patent Grant
Production sample shaping that preserves re-normalizability
- Patent number 10,338,004
- Issue date Jul 2, 2019
- KLA-Tencor Corp.
- Martin Plihal
- G01 - MEASURING TESTING
Information Patent Grant
Optimizing training sets used for setting up inspection-related alg...
- Patent number 10,267,748
- Issue date Apr 23, 2019
- KLA-Tencor Corp.
- Martin Plihal
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
System and method for production line monitoring
- Patent number 9,983,148
- Issue date May 29, 2018
- KLA-Tencor Corporation
- Saravanan Paramasivam
- G05 - CONTROLLING REGULATING
Information Patent Grant
System, method and computer program product for correcting a differ...
- Patent number 9,984,454
- Issue date May 29, 2018
- KLA-Tencor Corporation
- Martin Plihal
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
System, method and computer program product for detecting defects i...
- Patent number 9,940,705
- Issue date Apr 10, 2018
- KLA-Tencor Corporation
- Allen Park
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Adaptive sampling for process window determination
- Patent number 9,891,538
- Issue date Feb 13, 2018
- KLA-Tencor Corp.
- Martin Plihal
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Adaptive nuisance filter
- Patent number 9,835,566
- Issue date Dec 5, 2017
- KLA-Tencor Corp.
- Ardis Liang
- G01 - MEASURING TESTING
Information Patent Grant
Wafer inspection recipe setup
- Patent number 9,714,905
- Issue date Jul 25, 2017
- KLA-Tencor Corp.
- Martin Plihal
- G01 - MEASURING TESTING
Information Patent Grant
Creating defect classifiers and nuisance filters
- Patent number 9,613,411
- Issue date Apr 4, 2017
- KLA-Tencor Corp.
- Raghavan Konuru
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Dynamic binning for diversification and defect discovery
- Patent number 9,582,869
- Issue date Feb 28, 2017
- KLA-Tencor Corp.
- Martin Plihal
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Wafer defect discovery
- Patent number 9,518,934
- Issue date Dec 13, 2016
- KLA-Tencor Corp.
- Hong Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Composite defect classifier
- Patent number 9,430,743
- Issue date Aug 30, 2016
- KLA-Tencor Corp.
- Martin Plihal
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Unbiased wafer defect samples
- Patent number 8,948,494
- Issue date Feb 3, 2015
- KLA-Tencor Corp.
- Martin Plihal
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Scanner performance comparison and matching using design and defect...
- Patent number 8,594,823
- Issue date Nov 26, 2013
- KLA-Tencor Corporation
- Allen Park
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PROCESS WINDOW QUALIFICATION MODULATION LAYOUTS
- Publication number 20230175983
- Publication date Jun 8, 2023
- KLA Corporation
- Andrew CROSS
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DEEP LEARNING IMAGE DENOISING FOR SEMICONDUCTOR-BASED APPLICATIONS
- Publication number 20220383456
- Publication date Dec 1, 2022
- KLA Corporation
- Aditya Gulati
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Semiconductor Hot-Spot and Process-Window Discovery Combining Optic...
- Publication number 20210042908
- Publication date Feb 11, 2021
- KLA Corporation
- Ardis Liang
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR PROCESS MONITORING WITH OPTICAL INSPECTIONS
- Publication number 20210035282
- Publication date Feb 4, 2021
- KLA Corporation
- Martin Plihal
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
System and Method for Determining Defects Using Physics-Based Image...
- Publication number 20210027445
- Publication date Jan 28, 2021
- KLA Corporation
- Martin Plihal
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Defect Candidate Generation for Inspection
- Publication number 20200328104
- Publication date Oct 15, 2020
- KLA Corporation
- Martin Plihal
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Methods And Systems For Inspection Of Semiconductor Structures With...
- Publication number 20200234428
- Publication date Jul 23, 2020
- KLA Corporation
- Jacob George
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
System and Method for Difference Filter and Aperture Selection Usin...
- Publication number 20200184628
- Publication date Jun 11, 2020
- KLA-Tencor Corporation
- Santosh Bhattacharyya
- G01 - MEASURING TESTING
Information Patent Application
DESIGN AND NOISE BASED CARE AREAS
- Publication number 20200126212
- Publication date Apr 23, 2020
- KLA-Tencor Corporation
- Brian Duffy
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Mode Selection for Inspection
- Publication number 20190302031
- Publication date Oct 3, 2019
- KLA-Tencor Corporation
- Martin Plihal
- G01 - MEASURING TESTING
Information Patent Application
NUISANCE MINING FOR NOVEL DEFECT DISCOVERY
- Publication number 20190287015
- Publication date Sep 19, 2019
- KLA-Tencor Corporation
- Martin Plihal
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Defect Location Accuracy Using Shape Based Grouping Guided Defect C...
- Publication number 20190072505
- Publication date Mar 7, 2019
- KLA-Tencor Corporation
- Jagdish Chandra SARASWATULA
- G01 - MEASURING TESTING
Information Patent Application
Identifying Nuisances and Defects of Interest in Defects Detected o...
- Publication number 20190067060
- Publication date Feb 28, 2019
- KLA-Tencor Corporation
- Martin Plihal
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Care Areas for Improved Electron Beam Defect Detection
- Publication number 20180277337
- Publication date Sep 27, 2018
- KLA-Tencor Corporation
- Vidyasagar Anantha
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM, METHOD FOR TRAINING AND APPLYING DEFECT CLASSIFIERS IN WAFE...
- Publication number 20180204315
- Publication date Jul 19, 2018
- KLA-Tencor Corporation
- Martin Plihal
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Diagnostic Methods for the Classifiers and the Defects Captured by...
- Publication number 20180197714
- Publication date Jul 12, 2018
- KLA-Tencor Corporation
- Martin Plihal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Optimizing Training Sets Used for Setting Up Inspection-Related Alg...
- Publication number 20180106732
- Publication date Apr 19, 2018
- KLA-Tencor Corporation
- Martin Plihal
- G01 - MEASURING TESTING
Information Patent Application
SYSTEM, METHOD AND COMPUTER PROGRAM PRODUCT FOR DETECTING DEFECTS I...
- Publication number 20170323434
- Publication date Nov 9, 2017
- KLA-Tencor Corporation
- Allen Park
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SYSTEM, METHOD AND COMPUTER PROGRAM PRODUCT FOR CORRECTING A DIFFER...
- Publication number 20170309007
- Publication date Oct 26, 2017
- KLA-Tencor Corporation
- Martin Plihal
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Adaptive Automatic Defect Classification
- Publication number 20170082555
- Publication date Mar 23, 2017
- KLA-Tencor Corporation
- Li He
- G01 - MEASURING TESTING
Information Patent Application
Wafer Defect Discovery
- Publication number 20170076911
- Publication date Mar 16, 2017
- KLA-Tencor Corporation
- Hong Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System and Method for Production Line Monitoring
- Publication number 20160377552
- Publication date Dec 29, 2016
- KLA-Tencor Corporation
- Saravanan Paramasivam
- G01 - MEASURING TESTING
Information Patent Application
Adaptive Sampling for Process Window Determination
- Publication number 20160274036
- Publication date Sep 22, 2016
- KLA-Tencor Corporation
- Martin Plihal
- G01 - MEASURING TESTING
Information Patent Application
Adaptive Nuisance Filter
- Publication number 20160258879
- Publication date Sep 8, 2016
- KLA-Tencor Corporation
- Ardis Liang
- G01 - MEASURING TESTING
Information Patent Application
Wafer Defect Discovery
- Publication number 20160123898
- Publication date May 5, 2016
- KLA-Tencor Corporation
- Hong Chen
- G01 - MEASURING TESTING
Information Patent Application
Dynamic Binning for Diversification and Defect Discovery
- Publication number 20160110857
- Publication date Apr 21, 2016
- KLA-Tencor Corporation
- Martin Plihal
- G01 - MEASURING TESTING
Information Patent Application
Production Sample Shaping that Preserves Re-Normalizability
- Publication number 20150276618
- Publication date Oct 1, 2015
- KLA-Tencor Corporation
- Martin Plihal
- G01 - MEASURING TESTING
Information Patent Application
Creating Defect Classifiers and Nuisance Filters
- Publication number 20150262038
- Publication date Sep 17, 2015
- KLA-Tencor Corporation
- Raghavan Konuru
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Composite Defect Classifier
- Publication number 20150254832
- Publication date Sep 10, 2015
- KLA-Tencor Corporation
- Martin Plihal
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Unbiased Wafer Defect Samples
- Publication number 20140133737
- Publication date May 15, 2014
- KLA-Tencor Corporation
- Martin Plihal
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...

Martin Plihal

Person

Patents Grantslast 30 patents

System and method for determining defects using physics-based image...

Nuisance mining for novel defect discovery

Methods and systems for inspection of semiconductor structures with...

Method for process monitoring with optical inspections

Diagnostic methods for the classifiers and the defects captured by...

System and method for difference filter and aperture selection usin...

Defect location accuracy using shape based grouping guided defect c...

Defect candidate generation for inspection

Semiconductor hot-spot and process-window discovery combining optic...

System, method for training and applying defect classifiers in wafe...

Creating and tuning a classifier to capture more defects of interes...

And noise based care areas

Identifying nuisances and defects of interest in defects detected o...

Care areas for improved electron beam defect detection

Mode selection for inspection

Adaptive automatic defect classification

Production sample shaping that preserves re-normalizability

Optimizing training sets used for setting up inspection-related alg...

System and method for production line monitoring

System, method and computer program product for correcting a differ...

System, method and computer program product for detecting defects i...

Adaptive sampling for process window determination

Adaptive nuisance filter

Wafer inspection recipe setup

Creating defect classifiers and nuisance filters

Dynamic binning for diversification and defect discovery

Wafer defect discovery

Composite defect classifier

Unbiased wafer defect samples

Scanner performance comparison and matching using design and defect...

Patents Applicationslast 30 patents

PROCESS WINDOW QUALIFICATION MODULATION LAYOUTS

DEEP LEARNING IMAGE DENOISING FOR SEMICONDUCTOR-BASED APPLICATIONS

Semiconductor Hot-Spot and Process-Window Discovery Combining Optic...

METHOD FOR PROCESS MONITORING WITH OPTICAL INSPECTIONS

System and Method for Determining Defects Using Physics-Based Image...

Defect Candidate Generation for Inspection

Methods And Systems For Inspection Of Semiconductor Structures With...

System and Method for Difference Filter and Aperture Selection Usin...

DESIGN AND NOISE BASED CARE AREAS

Mode Selection for Inspection

NUISANCE MINING FOR NOVEL DEFECT DISCOVERY

Defect Location Accuracy Using Shape Based Grouping Guided Defect C...

Identifying Nuisances and Defects of Interest in Defects Detected o...

Care Areas for Improved Electron Beam Defect Detection

SYSTEM, METHOD FOR TRAINING AND APPLYING DEFECT CLASSIFIERS IN WAFE...

Diagnostic Methods for the Classifiers and the Defects Captured by...

Optimizing Training Sets Used for Setting Up Inspection-Related Alg...

SYSTEM, METHOD AND COMPUTER PROGRAM PRODUCT FOR DETECTING DEFECTS I...

SYSTEM, METHOD AND COMPUTER PROGRAM PRODUCT FOR CORRECTING A DIFFER...

Adaptive Automatic Defect Classification

Wafer Defect Discovery

System and Method for Production Line Monitoring

Adaptive Sampling for Process Window Determination

Adaptive Nuisance Filter

Wafer Defect Discovery

Dynamic Binning for Diversification and Defect Discovery

Production Sample Shaping that Preserves Re-Normalizability

Creating Defect Classifiers and Nuisance Filters

Composite Defect Classifier

Unbiased Wafer Defect Samples