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Martin Schmidt
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Vanves, FR
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Patents Grants
last 30 patents
Information
Patent Grant
Method and device for producing extreme ultraviolet radiation or so...
Patent number
7,619,232
Issue date
Nov 17, 2009
XTREME Technologies GmbH
Martin Schmidt
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Apparatus for generating light in the extreme ultraviolet and use i...
Patent number
7,399,981
Issue date
Jul 15, 2008
Commissariat Energie Atomique
Guy Cheymol
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Production of a dense mist of micrometric droplets in particular fo...
Patent number
6,647,088
Issue date
Nov 11, 2003
Commissariat a l'Energie Atomique
Martin Schmidt
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
Information
Patent Application
Method and Device for Producing Extreme Ultraviolet Radiation or So...
Publication number
20080116400
Publication date
May 22, 2008
Martin Schmidt
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Apparatus for generating light in the extreme ultraviolet and use i...
Publication number
20060039435
Publication date
Feb 23, 2006
Guy Cheymol
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Method and device for generating extreme ultravilolet radiation in...
Publication number
20040129896
Publication date
Jul 8, 2004
Martin Schmidt
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR