Martin SHIM

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Pleasanton, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Method for reducing line width roughness with plasma pre-etch treat...
- Patent number 8,329,585
- Issue date Dec 11, 2012
- Lam Research Corporation
- Ben-Li Sheu
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR REDUCING LINE WIDTH ROUGHNESS WITH PLASMA PRE-ETCH TREAT...
- Publication number 20110117749
- Publication date May 19, 2011
- LAM RESEARCH CORPORATION
- Ben-Li SHEU
- H01 - BASIC ELECTRIC ELEMENTS