Martin Verbeek

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Muenchen, DE

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Patents Grantslast 30 patents

Information Patent Grant
Method for checking periodic structures on lithography masks
- Patent number 7,424,144
- Issue date Sep 9, 2008
- Infineon Technologies AG
- Roderick Koehle
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for inspection of periodic grating structures on lithography...
- Patent number 7,262,850
- Issue date Aug 28, 2007
- Infineon Technologies AG
- Wolfgang Dettmann
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Defect repair method, in particular for repairing quartz defects on...
- Patent number 7,108,798
- Issue date Sep 19, 2006
- Infineon Technologies AG
- Ralf Ludwig
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure mask with repaired dummy structure and method of repairing...
- Patent number 6,756,164
- Issue date Jun 29, 2004
- Infineon Technologies AG
- Torsten Franke
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Method for removing defect material of a lithography mask
- Publication number 20070037071
- Publication date Feb 15, 2007
- Qimonda AG
- Christoph Noelscher
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for checking periodic structures on lithography masks
- Publication number 20050048379
- Publication date Mar 3, 2005
- Roderick Koehle
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for inspection of periodic grating structures on lithography...
- Publication number 20040165763
- Publication date Aug 26, 2004
- Wolfgang Dettmann
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Defect repair method, in particular for repairing quartz defects on...
- Publication number 20040124175
- Publication date Jul 1, 2004
- Infineon Technologies AG
- Ralf Ludwig
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure mask with repaired dummy structure and method of repairing...
- Publication number 20030003377
- Publication date Jan 2, 2003
- Torsten Franke
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and device for analyzing structures of a photomask
- Publication number 20020001764
- Publication date Jan 3, 2002
- Guenther Ruhl
- G06 - COMPUTING CALCULATING COUNTING