MARTIN VOELCKER

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KOENIGSBRONN-ZANG, DE

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Patents Grantslast 30 patents

Information Patent Grant
Method for removing a particle from a mask system
- Patent number 11,774,870
- Issue date Oct 3, 2023
- Carl Zeiss SMT GmbH
- Sergey Oshemkov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and assembly for characterizing a mask or a wafer for microl...
- Patent number 11,269,260
- Issue date Mar 8, 2022
- Carl Zeiss SMT GmbH
- Michael Carl
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithography apparatus comprising a plurality of individually contro...
- Patent number 11,003,090
- Issue date May 11, 2021
- Carl Zeiss SMT GmbH
- Stefan Richter
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Applications of adaptive optics in microscopy
- Patent number 7,733,564
- Issue date Jun 8, 2010
- Carl Zeiss MicroImaging
- Ralf Wolleschensky
- G02 - OPTICS
Information Patent Grant
Applications of adaptive optics in microscopy
- Patent number 6,771,417
- Issue date Aug 3, 2004
- Carl Zeiss Jena GmbH
- Ralf Wolleschensky
- G02 - OPTICS
Information Patent Grant
Scanning probe microscope with probe integrated in an optical system
- Patent number 6,545,263
- Issue date Apr 8, 2003
- Carl Zeiss Jena GmbH
- Ralph Lange
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR REMOVING A PARTICLE FROM A MASK SYSTEM
- Publication number 20230053667
- Publication date Feb 23, 2023
- Carl Zeiss SMT GMBH
- Sergey Oshemkov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND ASSEMBLY FOR CHARACTERIZING A MASK OR A WAFER FOR MICROL...
- Publication number 20210157243
- Publication date May 27, 2021
- Carl Zeiss SMT GMBH
- Michael Carl
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHY APPARATUS COMPRISING A PLURALITY OF INDIVIDUALLY CONTRO...
- Publication number 20200166852
- Publication date May 28, 2020
- Carl Zeiss SMT GMBH
- Stefan Richter
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
LITHOGRAPHY APPARATUS COMPRISING A PLURALITY OF INDIVIDUALLY CONTRO...
- Publication number 20170255110
- Publication date Sep 7, 2017
- Carl Zeiss SMT GMBH
- Stefan Richter
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Applications of adaptive optics in microscopy
- Publication number 20020154398
- Publication date Oct 24, 2002
- Ralf Wolleschensky
- G02 - OPTICS
Information Patent Application
SCANNING PROBE MICROSCOPE WITH PROBE INTEGRATED IN AN OPTICAL SYSTEM
- Publication number 20020139923
- Publication date Oct 3, 2002
- RALPH LANGE
- B82 - NANO-TECHNOLOGY