Martin Vogt

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Mutlangen, DE

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Patents Grantslast 30 patents

Information Patent Grant
Support of an optical unit
- Patent number 11,307,503
- Issue date Apr 19, 2022
- Carl Zeiss SMT GmbH
- Martin Vogt
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical system for a microlithographic projection exposure apparatu...
- Patent number 9,946,161
- Issue date Apr 17, 2018
- Carl Zeiss SMT GmbH
- Ingo Saenger
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Facet mirror device
- Patent number 9,465,208
- Issue date Oct 11, 2016
- Carl Zeiss SMT GmbH
- Martin Vogt
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
SUPPORT OF AN OPTICAL UNIT
- Publication number 20210116823
- Publication date Apr 22, 2021
- Carl Zeiss SMT GMBH
- Martin Vogt
- G02 - OPTICS
Information Patent Application
FACET MIRROR DEVICE
- Publication number 20140104589
- Publication date Apr 17, 2014
- Martin Vogt
- G02 - OPTICS
Information Patent Application
OPTICAL SYSTEM FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATU...
- Publication number 20130077077
- Publication date Mar 28, 2013
- Carl Zeiss SMT GMBH
- Ingo Saenger
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY