Martin von Hodenberg

Person

Oberkochen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Projection exposure apparatus with at least one manipulator
- Patent number 10,303,063
- Issue date May 28, 2019
- Carl Zeiss SMT GmbH
- Boris Bittner
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of operating a microlithographic projection apparatus
- Patent number 10,018,907
- Issue date Jul 10, 2018
- Carl Zeiss SMT GmbH
- Boris Bittner
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System correction from long timescales
- Patent number 9,829,800
- Issue date Nov 28, 2017
- Carl Zeiss SMT GmbH
- Boris Bittner
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure method and projection exposure apparatus for mi...
- Patent number 9,817,316
- Issue date Nov 14, 2017
- Carl Zeiss SMT GmbH
- Boris Bittner
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Reflective optical element for EUV lithography and method of manufa...
- Patent number 9,606,446
- Issue date Mar 28, 2017
- Carl Zeiss SMT GmbH
- Norbert Wabra
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Projection objective of a microlithographic projection exposure app...
- Patent number 9,372,411
- Issue date Jun 21, 2016
- Carl Zeiss SMT GmbH
- Johannes Zellner
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Microlithographic apparatus
- Patent number 9,348,234
- Issue date May 24, 2016
- Carl Zeiss SMT GmbH
- Boris Bittner
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus with at least one manipulator
- Patent number 9,170,497
- Issue date Oct 27, 2015
- Carl Zeiss SMT GmbH
- Boris Bittner
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination and displacement device for a projection exposure appa...
- Patent number 9,134,613
- Issue date Sep 15, 2015
- Carl Zeiss SMT GmbH
- Sonja Schneider
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
PROJECTION EXPOSURE APPARATUS WITH AT LEAST ONE MANIPULATOR
- Publication number 20180173100
- Publication date Jun 21, 2018
- Carl Zeiss SMT GMBH
- Boris Bittner
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROJECTION EXPOSURE METHOD AND PROJECTION EXPOSURE APPARATUS FOR MI...
- Publication number 20180136565
- Publication date May 17, 2018
- Carl Zeiss SMT GMBH
- Boris Bittner
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROJECTION EXPOSURE METHOD AND PROJECTION EXPOSURE APPARATUS FOR MI...
- Publication number 20160209754
- Publication date Jul 21, 2016
- Carl Zeiss SMT GMBH
- Boris Bittner
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Reflective Optical Element for EUV Lithography and Method of Manufa...
- Publication number 20150316851
- Publication date Nov 5, 2015
- Carl Zeiss SMT GMBH
- Norbert WABRA
- G02 - OPTICS
Information Patent Application
SYSTEM CORRECTION FROM LONG TIMESCALES
- Publication number 20150160562
- Publication date Jun 11, 2015
- Carl Zeiss SMT GMBH
- Boris Bittner
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATION AND DISPLACEMENT DEVICE FOR A PROJECTION EXPOSURE APPA...
- Publication number 20140239192
- Publication date Aug 28, 2014
- Sonja Schneider
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROJECTION OBJECTIVE OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APP...
- Publication number 20140185024
- Publication date Jul 3, 2014
- Johannes Zellner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Projection Exposure Apparatus with at least One Manipulator
- Publication number 20130258302
- Publication date Oct 3, 2013
- Boris Bittner
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Martin von Hodenberg

Person

Patents Grantslast 30 patents

Projection exposure apparatus with at least one manipulator

Method of operating a microlithographic projection apparatus

System correction from long timescales

Projection exposure method and projection exposure apparatus for mi...

Reflective optical element for EUV lithography and method of manufa...

Projection objective of a microlithographic projection exposure app...

Microlithographic apparatus

Projection exposure apparatus with at least one manipulator

Illumination and displacement device for a projection exposure appa...

Patents Applicationslast 30 patents

PROJECTION EXPOSURE APPARATUS WITH AT LEAST ONE MANIPULATOR

PROJECTION EXPOSURE METHOD AND PROJECTION EXPOSURE APPARATUS FOR MI...

PROJECTION EXPOSURE METHOD AND PROJECTION EXPOSURE APPARATUS FOR MI...

Reflective Optical Element for EUV Lithography and Method of Manufa...

SYSTEM CORRECTION FROM LONG TIMESCALES

ILLUMINATION AND DISPLACEMENT DEVICE FOR A PROJECTION EXPOSURE APPA...

PROJECTION OBJECTIVE OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APP...

Projection Exposure Apparatus with at least One Manipulator