Martin Willmann

Person

Reutlingen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Sensor having a thin film element
- Patent number 6,101,872
- Issue date Aug 15, 2000
- Robert Bosch GmbH
- Martin Zechnall
- G01 - MEASURING TESTING
Information Patent Grant
Method for manufacturing micro-mechanical components using selectiv...
- Patent number 5,542,558
- Issue date Aug 6, 1996
- Robert Bosch GmbH
- Gerhard Benz
- G01 - MEASURING TESTING
Information Patent Grant
Acceleration sensor
- Patent number 5,461,917
- Issue date Oct 31, 1995
- Robert Bosch GmbH
- Jiri Marek
- G01 - MEASURING TESTING
Information Patent Grant
Method of making sensor
- Patent number 5,355,569
- Issue date Oct 18, 1994
- Robert Bosch GmbH
- Jiri Marek
- G01 - MEASURING TESTING
Information Patent Grant
Device for one-sided etching of a semiconductor wafer
- Patent number 5,324,410
- Issue date Jun 28, 1994
- Robert Bosch GmbH
- Nils Kummer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of making an acceleration sensor
- Patent number 5,310,450
- Issue date May 10, 1994
- Robert Bosch GmbH
- Michael Offenberg
- G01 - MEASURING TESTING
Information Patent Grant
Method of assembling micromechanical sensors
- Patent number 5,273,939
- Issue date Dec 28, 1993
- Robert Bosch GmbH
- Rolf Becker
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microvalve of multilayer silicon construction
- Patent number 5,216,273
- Issue date Jun 1, 1993
- Robert Bosch GmbH
- Christian Doering
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...

Martin Willmann

Person

Patents Grantslast 30 patents

Sensor having a thin film element

Method for manufacturing micro-mechanical components using selectiv...

Acceleration sensor

Method of making sensor

Device for one-sided etching of a semiconductor wafer

Method of making an acceleration sensor

Method of assembling micromechanical sensors

Microvalve of multilayer silicon construction