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Martin ZECH
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Finsing, DE
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last 30 patents
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Patent Grant
Interferometric displacement sensor for integration into machine to...
Patent number
10,260,863
Issue date
Apr 16, 2019
attocube Systems AG
Martin Zech
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
INTERFEROMETRIC DISPLACEMENT SENSOR FOR INTEGRATION INTO MACHINE TO...
Publication number
20170045353
Publication date
Feb 16, 2017
attocube systems AG
Martin ZECH
G01 - MEASURING TESTING