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Martinus Cornelis Maria Verhagen
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Valkenswaard, NL
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Patents Grants
last 30 patents
Information
Patent Grant
Lithographic apparatus and device manufacturing method involving a...
Patent number
11,378,893
Issue date
Jul 5, 2022
ASML Netherlands B.V.
Theodorus Petrus Maria Cadee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method involving a...
Patent number
10,838,310
Issue date
Nov 17, 2020
ASML Netherlands B.V.
Theodorus Petrus Maria Cadee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
10,705,439
Issue date
Jul 7, 2020
ASML Netherlands B.V.
Nicolaas Rudolf Kemper
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
10,599,054
Issue date
Mar 24, 2020
ASML Holding N.V.
Nicolaas Rudolf Kemper
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
10,331,047
Issue date
Jun 25, 2019
ASML Netherlands B.V.
Nicolaas Rudolf Kemper
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method involving a...
Patent number
10,254,663
Issue date
Apr 9, 2019
ASML Netherlands B.V.
Theodorus Petrus Maria Cadee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
10,248,033
Issue date
Apr 2, 2019
ASML Netherlands B.V.
Jeroen Johannes Sophia Maria Mertens
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
9,904,185
Issue date
Feb 27, 2018
ASML Netherlands B.V.
Nicolaas Rudolf Kemper
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
9,753,380
Issue date
Sep 5, 2017
ASML Netherlands B.V.
Jeroen Johannes Sophia Maria Mertens
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
9,746,788
Issue date
Aug 29, 2017
ASML Netherlands B.V.
Nicolaas Rudolf Kemper
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
9,581,914
Issue date
Feb 28, 2017
ASML Netherlands B.V.
Marcel Mathijs Theodore Marie Dierichs
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
9,507,278
Issue date
Nov 29, 2016
ASML Netherlands B.V.
Nicolaas Rudolf Kemper
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
9,488,923
Issue date
Nov 8, 2016
ASML Netherlands B.V.
Nicolaas Rudolf Kemper
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
9,436,097
Issue date
Sep 6, 2016
ASML Netherlands B.V.
Jeroen Johannes Sophia Maria Mertens
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Source-collector device, lithographic apparatus, and device manufac...
Patent number
9,411,238
Issue date
Aug 9, 2016
ASML Netherlands B.V.
Andrei Mikhailovich Yakunin
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Lithographic apparatus and device manufacturing method having heat...
Patent number
9,268,236
Issue date
Feb 23, 2016
ASML Netherlands B.V.
Johannes Henricus Wilhelmus Jacobs
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method involving a...
Patent number
9,268,242
Issue date
Feb 23, 2016
ASML Netherlands B.V.
Theodorus Petrus Maria Cadee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method involving a...
Patent number
9,188,880
Issue date
Nov 17, 2015
ASML Netherlands B.V.
Theodorus Petrus Maria Cadee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
9,097,992
Issue date
Aug 4, 2015
ASML Netherlands B.V.
Nicolaas Rudolf Kemper
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
9,025,127
Issue date
May 5, 2015
ASML Netherlands B.V.
Marcel Mathijs Theodore Marie Dierichs
C02 - TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
Information
Patent Grant
Lithographic apparatus, device manufacturing method and apparatus f...
Patent number
8,958,051
Issue date
Feb 17, 2015
ASML Netherlands B.V.
Martinus Cornelis Maria Verhagen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,953,144
Issue date
Feb 10, 2015
ASML Netherlands B.V.
Marcel Mathijs Theodore Marie Dierichs
C02 - TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,934,082
Issue date
Jan 13, 2015
ASML Netherlands B.V.
Jeroen Johannes Sophia Maria Mertens
G06 - COMPUTING CALCULATING COUNTING
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Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,902,404
Issue date
Dec 2, 2014
ASML Netherlands B.V.
Marco Koert Stavenga
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,755,028
Issue date
Jun 17, 2014
ASML Netherlands B.V.
Nicolaas Rudolf Kemper
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,629,971
Issue date
Jan 14, 2014
ASML Netherlands B.V.
Marcel Mathijs Theodore Marie Dierichs
C02 - TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
Information
Patent Grant
Thermal conditioning system for thermal conditioning a part of a li...
Patent number
8,610,089
Issue date
Dec 17, 2013
ASML Netherlands B.V.
Sjoerd Nicolaas Lambertus Donders
F28 - HEAT EXCHANGE IN GENERAL
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,508,711
Issue date
Aug 13, 2013
ASML Netherlands B.V.
Arjan Hubrecht Josef Anna Martens
G01 - MEASURING TESTING
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,446,563
Issue date
May 21, 2013
ASML Netherlands B.V.
Nicolaas Rudolf Kemper
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
CONDITIONING APPARATUS AND METHOD
Publication number
20230400785
Publication date
Dec 14, 2023
ASML NETHERLANDS B.V.
Antonius Johannus VAN DER NET
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD INVOLVING A...
Publication number
20210063898
Publication date
Mar 4, 2021
ASML NETHERLANDS B.V.
Theodorus Petrus Maria CADEE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20190294058
Publication date
Sep 26, 2019
ASML NETHERLANDS B.V.
Nicolaas Rudolf Kemper
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD INVOLVING A...
Publication number
20190235397
Publication date
Aug 1, 2019
ASML NETHERLANDS B.V.
Theodorus Petrus Maria CADEE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20180188661
Publication date
Jul 5, 2018
ASML NETHERLANDS B.V.
Nicolaas Rudolf KEMPER
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20180039188
Publication date
Feb 8, 2018
ASML NETHERLANDS B.V.
Jeroen Johannes Sophia Maria MERTENS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20170357165
Publication date
Dec 14, 2017
ASML NETHERLANDS B.V.
Nicolaas Rudolf KEMPER
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20170139333
Publication date
May 18, 2017
ASML NETHERLANDS B.V.
Marcel Mathijs Theodore Marie DIERICHS
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20170045831
Publication date
Feb 16, 2017
ASML NETHERLANDS B.V.
Nicolaas Rudolf KEMPER
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20170031250
Publication date
Feb 2, 2017
ASML NETHERLANDS B.V.
Nicolaas Rudolf KEMPER
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20160370714
Publication date
Dec 22, 2016
ASML NETHERLANDS B.V.
Jeroen Johannes Sophia Maria MERTENS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD INVOLVING A...
Publication number
20160048085
Publication date
Feb 18, 2016
ASML NETHERLANDS B.V.
Theodorus Petrus Maria CADEE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20150323876
Publication date
Nov 12, 2015
ASML NETHERLANDS B.V.
Nicolaas Rudolf KEMPER
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20150205214
Publication date
Jul 23, 2015
ASML NETHERLANDS B.V.
Marcel Mathijs Theodore Marie DIERICHS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20150109593
Publication date
Apr 23, 2015
ASML NETHERLANDS B.V.
Jeroen Johannes Sophia Maria MERTENS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SOURCE-COLLECTOR DEVICE, LITHOGRAPHIC APPARATUS, AND DEVICE MANUFAC...
Publication number
20140375974
Publication date
Dec 25, 2014
Andrei Mikhailovich Yakunin
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20140300883
Publication date
Oct 9, 2014
ASML NETHERLANDS B.V.
Nicolaas Rudolf Kemper
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20070070315
Publication date
Mar 29, 2007
ASML NETHERLANDS B.V.
Johannes Henricus Wilhelmus Jacobs
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20060232754
Publication date
Oct 19, 2006
ASML NETHERLANDS B.V.
Nicolas Alban Lallemant
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus, device manufacturing method and apparatus f...
Publication number
20060192929
Publication date
Aug 31, 2006
ASML NETHERLANDS B.V.
Martinus Cornelis Maria Verhagen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20060187427
Publication date
Aug 24, 2006
ASML NETHERLANDS B.V.
Marco Koert Stavenga
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Fluid filtration method, fluid filtered thereby, lithographic appar...
Publication number
20060186057
Publication date
Aug 24, 2006
ASML NETHERLANDS B.V.
Martinus Cornelis Maria Verhagen
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20060087630
Publication date
Apr 27, 2006
ASML NETHERLANDS B.V.
Nicolaas Rudolf Kemper
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20060033898
Publication date
Feb 16, 2006
ASML NETHERLANDS B.V.
Theodorus Petrus Maria Cadee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20050254025
Publication date
Nov 17, 2005
ASML NETHERLANDS B.V.
Nicolas Alban Lallemant
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus, device manufacturing method, and device man...
Publication number
20050035307
Publication date
Feb 17, 2005
ASML NETHERLANDS B.V.
Martinus Cornelis Maria Verhagen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY