Martinus H. H. Hoeks

Person

Breugel, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Lithography apparatus, a device manufacturing method, a method of m...
- Patent number 9,594,304
- Issue date Mar 14, 2017
- ASML Netherlands B.V.
- Martinus Hendricus Henricus Hoeks
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus, method for maintaining a lithographic appar...
- Patent number 9,513,561
- Issue date Dec 6, 2016
- ASML Netherlands B.V.
- Arno Jan Bleeker
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 9,494,869
- Issue date Nov 15, 2016
- ASML Netherlands B.V.
- Hans Butler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithography apparatus, an apparatus for providing setpoint data, a...
- Patent number 9,354,502
- Issue date May 31, 2016
- ASML Netherlands B.V.
- Erik Roelof Loopstra
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
SLM calibration
- Patent number 8,717,535
- Issue date May 6, 2014
- ASML Netherlands B.V.
- Huibert Visser
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method utilizing a...
- Patent number 7,965,373
- Issue date Jun 21, 2011
- ASML Netherlands B.V.
- Martinus Hendricus Hendricus Hoeks
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method using repeat...
- Patent number 7,812,930
- Issue date Oct 12, 2010
- ASML Netherlands B.V.
- Theodorus Leonardus Van Den Akker
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System and method for determining maximum operational parameters us...
- Patent number 7,791,710
- Issue date Sep 7, 2010
- ASML Netherlands B.V.
- Martinus Hendricus Hoeks
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 7,460,208
- Issue date Dec 2, 2008
- ASML Netherlands B.V.
- Arno Jan Bleeker
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System and method for fault indication on a substrate in maskless a...
- Patent number 7,403,865
- Issue date Jul 22, 2008
- ASML Netherlands B.V.
- Martinus Hoeks
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 7,362,415
- Issue date Apr 22, 2008
- ASML Netherlands B.V.
- Dominicus Jacobus Petrus Adrianus Franken
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Chuck, lithographic apparatus and device manufacturing method
- Patent number 7,092,231
- Issue date Aug 15, 2006
- ASML Netherlands B.V.
- Martinus Hendricus Hendricus Hoeks
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Position measuring system for use in lithographic apparatus
- Patent number 6,894,261
- Issue date May 17, 2005
- ASML Netherlands B.V.
- Thomas J. M. Castenmiller
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position measuring device, position measuring system, lithographic...
- Patent number 6,875,992
- Issue date Apr 5, 2005
- ASML Netherlands B.V.
- Thomas J. M. Castenmiller
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
LITHOGRAPHY APPARATUS, AN APPARATUS FOR PROVIDING SETPOINT DATA, A...
- Publication number 20150227036
- Publication date Aug 13, 2015
- ASML Netherlands B.V.
- Erik Roelof Loopstra
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithography Apparatus, a Device Manufacturing Method, a Method Of M...
- Publication number 20150062547
- Publication date Mar 5, 2015
- ASML NETHERLANDS B.V.
- Martinus Hendricus Henricus Hoeks
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20140340666
- Publication date Nov 20, 2014
- ASML NETHERLANDS B.V.
- Hans Butler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS, METHOD FOR MAINTAINING A LITHOGRAPHIC APPAR...
- Publication number 20140009746
- Publication date Jan 9, 2014
- ASML NETHERLANDS B.V.
- Arno Jan Bleeker
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SLM Calibration
- Publication number 20090244506
- Publication date Oct 1, 2009
- ASML NETHERLANDS B.V.
- Huibert Visser
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
System and method for determining maximum operational parameters us...
- Publication number 20070030472
- Publication date Feb 8, 2007
- ASML NETHERLANDS B.V.
- Martinus Hendricus Hoeks
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and device manufacturing method
- Publication number 20060187428
- Publication date Aug 24, 2006
- ASML NETHERLANDS B.V.
- Arno Jan Bleeker
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
System and method for fault indication on a substrate in maskless a...
- Publication number 20060142967
- Publication date Jun 29, 2006
- ASML NETHERLANDS B.V.
- Martinus Hoeks
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
System and method for determining maximum operational parameters us...
- Publication number 20060139588
- Publication date Jun 29, 2006
- ASML NETHERLANDS B.V.
- Martinus Hendricus Hoeks
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and device manufacturing method
- Publication number 20060119815
- Publication date Jun 8, 2006
- Dominicus Jacobus Petrus Adrianus Franken
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Position measuring device, position measuring system, lithographic...
- Publication number 20040211921
- Publication date Oct 28, 2004
- ASML NETHERLANDS B.V.
- Thomas J.M. Castenmiller
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Chuck, lithographic apparatus and device manufacturing method
- Publication number 20040114124
- Publication date Jun 17, 2004
- ASML NETHERLANDS B.V.
- Martinus Hendricus Hendricus Hoeks
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Position detection system for use in lithographic apparatus
- Publication number 20010011712
- Publication date Aug 9, 2001
- Thomas J.M. Castenmiller
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Martinus H. H. Hoeks

Person

Patents Grantslast 30 patents

Lithography apparatus, a device manufacturing method, a method of m...

Lithographic apparatus, method for maintaining a lithographic appar...

Lithographic apparatus and device manufacturing method

Lithography apparatus, an apparatus for providing setpoint data, a...

SLM calibration

Lithographic apparatus and device manufacturing method utilizing a...

Lithographic apparatus and device manufacturing method using repeat...

System and method for determining maximum operational parameters us...

Lithographic apparatus and device manufacturing method

System and method for fault indication on a substrate in maskless a...

Lithographic apparatus and device manufacturing method

Chuck, lithographic apparatus and device manufacturing method

Position measuring system for use in lithographic apparatus

Position measuring device, position measuring system, lithographic...

Patents Applicationslast 30 patents

LITHOGRAPHY APPARATUS, AN APPARATUS FOR PROVIDING SETPOINT DATA, A...

Lithography Apparatus, a Device Manufacturing Method, a Method Of M...

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS, METHOD FOR MAINTAINING A LITHOGRAPHIC APPAR...

SLM Calibration

System and method for determining maximum operational parameters us...

Lithographic apparatus and device manufacturing method

System and method for fault indication on a substrate in maskless a...

System and method for determining maximum operational parameters us...

Lithographic apparatus and device manufacturing method

Position measuring device, position measuring system, lithographic...

Chuck, lithographic apparatus and device manufacturing method

Position detection system for use in lithographic apparatus