Martinus Hendrikus Antonius Leenders

Person

Rhoon, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Calibration system for an extreme ultraviolet light source
- Patent number 12,174,550
- Issue date Dec 24, 2024
- ASML Netherlands B.V.
- Daniel Jason Riggs
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Vessel for a radiation source
- Patent number 12,007,699
- Issue date Jun 11, 2024
- ASML Netherlands B.V.
- Sander Kerssemakers
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Prolonging optical element lifetime in an EUV lithography system
- Patent number 11,846,887
- Issue date Dec 19, 2023
- ASML Netherlands B.V.
- Yue Ma
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 11,789,369
- Issue date Oct 17, 2023
- ASML Netherlands B.V.
- Martinus Hendrikus Antonius Leenders
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Prolonging optical element lifetime in an EUV lithography system
- Patent number 11,340,532
- Issue date May 24, 2022
- ASML Netherlands B.V.
- Yue Ma
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 11,327,404
- Issue date May 10, 2022
- ASML Netherlands B.V.
- Sjoerd Nicolaas Lambertus Donders
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 11,209,738
- Issue date Dec 28, 2021
- ASML Netherlands B.V.
- Martinus Hendrikus Antonius Leenders
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 11,016,394
- Issue date May 25, 2021
- ASML Netherlands B.V.
- Bob Streefkerk
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mask assembly
- Patent number 11,009,803
- Issue date May 18, 2021
- ASML Netherlands B.V.
- Matthias Kruizinga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pellicle attachment apparatus
- Patent number 11,003,098
- Issue date May 11, 2021
- ASML Netherlands B.V.
- Frits Van Der Meulen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pellicle attachment apparatus
- Patent number 10,969,701
- Issue date Apr 6, 2021
- ASML Netherlands B.V.
- Frits Van Der Meulen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus
- Patent number 10,788,763
- Issue date Sep 29, 2020
- ASML Netherlands B.V.
- Jan Steven Christiaan Westerlaken
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 10,768,536
- Issue date Sep 8, 2020
- ASML Netherlands B.V.
- Martinus Hendrikus Antonius Leenders
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Support apparatus, a lithographic apparatus and a device manufactur...
- Patent number 10,768,535
- Issue date Sep 8, 2020
- ASML Netherlands B.V.
- Andre Bernardus Jeunink
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for manufacturing a membrane assembly
- Patent number 10,712,656
- Issue date Jul 14, 2020
- ASML Netherlands B.V.
- Zomer Silvester Houweling
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 10,705,439
- Issue date Jul 7, 2020
- ASML Netherlands B.V.
- Nicolaas Rudolf Kemper
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 10,684,554
- Issue date Jun 16, 2020
- ASML Netherlands B.V.
- Bob Streefkerk
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate support, method for loading a substrate on a substrate su...
- Patent number 10,656,536
- Issue date May 19, 2020
- ASML Netherlands B.V.
- Martinus Hendrikus Antonius Leenders
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lithographic apparatus
- Patent number 10,649,341
- Issue date May 12, 2020
- ASML Netherlands B.V.
- Clemens Johannes Gerardus Van den Dungen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus, a dryer and a method of removing liquid fro...
- Patent number 10,649,349
- Issue date May 12, 2020
- ASML Holding N.V.
- Martinus Hendrikus Antonius Leenders
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mask assembly
- Patent number 10,558,129
- Issue date Feb 11, 2020
- ASML Netherlands B.V.
- Matthias Kruizinga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pellicle attachment apparatus
- Patent number 10,539,886
- Issue date Jan 21, 2020
- ASML Netherlands B.V.
- Frits Van Der Meulen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Support apparatus, lithographic apparatus and device manufacturing...
- Patent number 10,514,615
- Issue date Dec 24, 2019
- ASML Netherlands B.V.
- Andre Bernardus Jeunink
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 10,488,759
- Issue date Nov 26, 2019
- ASML Netherlands B.V.
- Bob Streefkerk
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 10,451,973
- Issue date Oct 22, 2019
- ASML Netherlands B.V.
- Bob Streefkerk
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus operable to perform a measurement operation on a substrat...
- Patent number 10,444,632
- Issue date Oct 15, 2019
- ASML Netherlands B.V.
- Daan Maurits Slotboom
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 10,386,725
- Issue date Aug 20, 2019
- ASML Netherlands B.V.
- Sjoerd Nicolaas Lambertus Donders
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 10,353,296
- Issue date Jul 16, 2019
- ASML Netherlands B.V.
- Bob Streefkerk
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus, a dryer and a method of removing liquid fro...
- Patent number 10,185,231
- Issue date Jan 22, 2019
- ASML Holding N.V.
- Martinus Hendrikus Antonius Leenders
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and a method of operating the apparatus
- Patent number 10,175,585
- Issue date Jan 8, 2019
- ASML Netherlands B.V.
- Robert Douglas Watso
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
PROLONGING OPTICAL ELEMENT LIFETIME IN AN EUV LITHOGRAPHY SYSTEM
- Publication number 20240160109
- Publication date May 16, 2024
- ASML NETHERLANDS B.V.
- Yue Ma
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
VESSEL FOR A RADIATION SOURCE
- Publication number 20230023631
- Publication date Jan 26, 2023
- ASML NETHERLANDS B.V.
- Sander KERSSEMAKERS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CALIBRATION SYSTEM FOR AN EXTREME ULTRAVIOLET LIGHT SOURCE
- Publication number 20230018949
- Publication date Jan 19, 2023
- ASML NETHERLANDS B.V.
- Daniel Jason Riggs
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
PROLONGING OPTICAL ELEMENT LIFETIME IN AN EUV LITHOGRAPHY SYSTEM
- Publication number 20220291591
- Publication date Sep 15, 2022
- ASML NETHERLANDS B.V.
- Yue Ma
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20220113641
- Publication date Apr 14, 2022
- ASML NETHERLANDS B.V.
- Martinus Hendrikus Antonius LEENDERS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROLONGING OPTICAL ELEMENT LIFETIME IN AN EUV LITHOGRAPHY SYSTEM
- Publication number 20210109452
- Publication date Apr 15, 2021
- ASML NETHERLANDS B.V.
- Yue Ma
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20200401057
- Publication date Dec 24, 2020
- ASML NETHERLANDS B.V.
- Martinus Hendrikus Antonius LEENDERS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20200310252
- Publication date Oct 1, 2020
- ASML NETHERLANDS B.V.
- Bob STREEFKERK
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUPPORT APPARATUS, A LITHOGRAPHIC APPARATUS AND A DEVICE MANUFACTUR...
- Publication number 20200142317
- Publication date May 7, 2020
- ASML NETHERLANDS B.V.
- Andre Bernardus JEUNINK
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Pellicle Attachment Apparatus
- Publication number 20200096882
- Publication date Mar 26, 2020
- ASML NETHERLANDS B.V.
- Frits VAN DER MEULEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Mask Assembly
- Publication number 20200057394
- Publication date Feb 20, 2020
- ASML NETHERLANDS B.V.
- Matthias KRUIZINGA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Pellicle Attachment Apparatus
- Publication number 20200012204
- Publication date Jan 9, 2020
- ASML NETHERLANDS B.V.
- Frits Van Der Meulen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20190369502
- Publication date Dec 5, 2019
- ASML NETHERLANDS B.V.
- Sjoerd Nicolaas Lambertus Donders
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20190339623
- Publication date Nov 7, 2019
- ASML NETHERLANDS B.V.
- Bob STREEFKERK
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS, A DRYER AND A METHOD OF REMOVING LIQUID FRO...
- Publication number 20190121247
- Publication date Apr 25, 2019
- ASML NETHERLANDS B.V.
- Martinus Hendrikus Antonius LEENDERS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20190079419
- Publication date Mar 14, 2019
- ASML NETHERLANDS B.V.
- Martinus Hendrikus Antonius LEENDERS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS OPERABLE TO PERFORM A MEASUREMENT OPERATION ON A SUBSTRAT...
- Publication number 20180364582
- Publication date Dec 20, 2018
- ASML, Netherlands B.V.
- Daan Maurits SLOTBOOM
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Mask Assembly
- Publication number 20180329314
- Publication date Nov 15, 2018
- Matthias KRUIZINGA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20180321594
- Publication date Nov 8, 2018
- ASML NETHERLANDS B.V.
- Bob STREEFKERK
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR MANUFACTURING A MEMBRANE ASSEMBLY
- Publication number 20180239240
- Publication date Aug 23, 2018
- ASML NETHERLANDS B.V.
- Zomer Silvester HOUWELING
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20180239260
- Publication date Aug 23, 2018
- ASML NETHERLANDS B.V.
- Sjoerd Nicolaas Lambertus Donders
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUPPORT APPARATUS, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING...
- Publication number 20180231897
- Publication date Aug 16, 2018
- ASML NETHERLANDS B.V.
- Andre Bernardus JEUNINK
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20180188661
- Publication date Jul 5, 2018
- ASML NETHERLANDS B.V.
- Nicolaas Rudolf KEMPER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20170248854
- Publication date Aug 31, 2017
- ASML NETHERLANDS B.V.
- Bob STREEFKERK
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS, A DRYER AND A METHOD OF REMOVING LIQUID FRO...
- Publication number 20170227856
- Publication date Aug 10, 2017
- ASML NETHERLANDS B.V.
- Martinus Hendrikus Antonius LEENDERS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20170212422
- Publication date Jul 27, 2017
- ASML NETHERLANDS B.V.
- Bob STREEFKERK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20170212432
- Publication date Jul 27, 2017
- ASML NETHERLANDS B.V.
- Martinus Hendrikus Antonius LEENDERS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE SUPPORT, METHOD FOR LOADING A SUBSTRATE ON A SUBSTRATE SU...
- Publication number 20170192359
- Publication date Jul 6, 2017
- ASML NETHERLANDS B.V.
- Martinus Hendrikus Antonius LEENDERS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LITHOGRAPHIC APPARATUS
- Publication number 20170068175
- Publication date Mar 9, 2017
- ASML NETHERLANDS B.V.
- Jan Steven Christiaan Westerlaken
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20170045831
- Publication date Feb 16, 2017
- ASML NETHERLANDS B.V.
- Nicolaas Rudolf KEMPER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Martinus Hendrikus Antonius Leenders

Person

Patents Grantslast 30 patents

Calibration system for an extreme ultraviolet light source

Vessel for a radiation source

Prolonging optical element lifetime in an EUV lithography system

Lithographic apparatus and device manufacturing method

Prolonging optical element lifetime in an EUV lithography system

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Mask assembly

Pellicle attachment apparatus

Pellicle attachment apparatus

Lithographic apparatus

Lithographic apparatus and device manufacturing method

Support apparatus, a lithographic apparatus and a device manufactur...

Method for manufacturing a membrane assembly

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Substrate support, method for loading a substrate on a substrate su...

Lithographic apparatus

Lithographic apparatus, a dryer and a method of removing liquid fro...

Mask assembly

Pellicle attachment apparatus

Support apparatus, lithographic apparatus and device manufacturing...

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Apparatus operable to perform a measurement operation on a substrat...

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Lithographic apparatus, a dryer and a method of removing liquid fro...

Lithographic apparatus and a method of operating the apparatus

Patents Applicationslast 30 patents

PROLONGING OPTICAL ELEMENT LIFETIME IN AN EUV LITHOGRAPHY SYSTEM

VESSEL FOR A RADIATION SOURCE

CALIBRATION SYSTEM FOR AN EXTREME ULTRAVIOLET LIGHT SOURCE

PROLONGING OPTICAL ELEMENT LIFETIME IN AN EUV LITHOGRAPHY SYSTEM

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

PROLONGING OPTICAL ELEMENT LIFETIME IN AN EUV LITHOGRAPHY SYSTEM

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

SUPPORT APPARATUS, A LITHOGRAPHIC APPARATUS AND A DEVICE MANUFACTUR...

Pellicle Attachment Apparatus

Mask Assembly

Pellicle Attachment Apparatus

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS, A DRYER AND A METHOD OF REMOVING LIQUID FRO...

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

APPARATUS OPERABLE TO PERFORM A MEASUREMENT OPERATION ON A SUBSTRAT...

Mask Assembly

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

METHOD FOR MANUFACTURING A MEMBRANE ASSEMBLY

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

SUPPORT APPARATUS, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING...

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS, A DRYER AND A METHOD OF REMOVING LIQUID FRO...

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

SUBSTRATE SUPPORT, METHOD FOR LOADING A SUBSTRATE ON A SUBSTRATE SU...

LITHOGRAPHIC APPARATUS

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD