Martinus Theodorus Jacobus Pieterse

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Veldhoven, NL

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Patents Grantslast 30 patents

Information Patent Grant
Measurement system, method and lithographic apparatus
- Patent number 8,681,316
- Issue date Mar 25, 2014
- ASML Netherlands B.V.
- Henrikus Herman Marie Cox
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY