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Martinus Wilhelmus Van Den Heuvel
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last 30 patents
Information
Patent Grant
Fluid extraction system, lithographic apparatus and device manufact...
Patent number
9,213,246
Issue date
Dec 15, 2015
ASML Netherlands B.V.
Nicolaas Rudolf Kemper
F01 - MACHINES OR ENGINES IN GENERAL ENGINE PLANTS IN GENERAL STEAM ENGINES
Information
Patent Grant
Conduit system for a lithographic apparatus, lithographic apparatus...
Patent number
8,976,332
Issue date
Mar 10, 2015
ASML Netherlands B.V.
Martinus Wilhelmus Van Den Heuvel
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Fluid extraction system, lithographic apparatus and device manufact...
Patent number
8,654,309
Issue date
Feb 18, 2014
ASML Netherlands B.V.
Nicolaas Rudolf Kemper
F01 - MACHINES OR ENGINES IN GENERAL ENGINE PLANTS IN GENERAL STEAM ENGINES
Information
Patent Grant
Conduit system for a lithographic apparatus, lithographic apparatus...
Patent number
7,843,548
Issue date
Nov 30, 2010
ASML Netherlands B.V.
Martinus Wilhelmus Van Den Heuvel
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Patents Applications
last 30 patents
Information
Patent Application
FLUID EXTRACTION SYSTEM, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACT...
Publication number
20140300879
Publication date
Oct 9, 2014
ASML NETHERLANDS B.V.
Nicolaas Rudolf KEMPER
F01 - MACHINES OR ENGINES IN GENERAL ENGINE PLANTS IN GENERAL STEAM ENGINES
Information
Patent Application
CONDUIT SYSTEM FOR A LITHOGRAPHIC APPARATUS, LITHOGRAPHIC APPARATUS...
Publication number
20110032497
Publication date
Feb 10, 2011
ASML NETHERLANDS B.V.
Martinus Wilhelmus VAN DEN HEUVEL
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
FLUID EXTRACTION SYSTEM, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACT...
Publication number
20100149501
Publication date
Jun 17, 2010
ASML NETHERLANDS B.V.
Nicolaas Rudolf KEMPER
F01 - MACHINES OR ENGINES IN GENERAL ENGINE PLANTS IN GENERAL STEAM ENGINES
Information
Patent Application
METHODS RELATING TO IMMERSION LITHOGRAPHY AND AN IMMERSION LITHOGRA...
Publication number
20100110398
Publication date
May 6, 2010
ASML NETHERLANDS B.V.
Roelof Frederik DE GRAAF
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY